复杂光学自由曲面抛光平台综合误差建模与误差补偿

Q3 Engineering
Zhang Zhong, Zhao Ji, Ji Shi Jun, Li Gang
{"title":"复杂光学自由曲面抛光平台综合误差建模与误差补偿","authors":"Zhang Zhong, Zhao Ji, Ji Shi Jun, Li Gang","doi":"10.1504/IJNM.2017.10008421","DOIUrl":null,"url":null,"abstract":"Four-axis polishing platform plays an important role in machining a complex optical free-form surface and the kinematic error generally determine the accuracy of the optical free-form surface fabricated by this platform. This paper analyses kinematics of the polishing platform based on the homogeneous coordinate transformation theory and the error of kinematics synthesis model is established. Based on minimum error assumption, transition matrix is obtained from machine tool coordinate system to the cutting tool coordinate system and changing rule of comprehensive error in different position and direction is gained in two-axis motion worktable. Laser interferometer is used to measure the geometric error of polishing platform, it is found that different feed rate and measured spacing had no significant effect on the positioning error of moving axis and positioning error rather than the straightness and angle error has more significant influence on the accuracy of machine tool. Compensation experiment was conducted based on integrated error model, the x-axis and z-axis positioning error was reduced by 87.37% and 90.32% after compensation and the compensation result is remarkable.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"371"},"PeriodicalIF":0.0000,"publicationDate":"2017-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Comprehensive error modelling and error compensation for complex optical free-form surface polishing platform\",\"authors\":\"Zhang Zhong, Zhao Ji, Ji Shi Jun, Li Gang\",\"doi\":\"10.1504/IJNM.2017.10008421\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Four-axis polishing platform plays an important role in machining a complex optical free-form surface and the kinematic error generally determine the accuracy of the optical free-form surface fabricated by this platform. This paper analyses kinematics of the polishing platform based on the homogeneous coordinate transformation theory and the error of kinematics synthesis model is established. Based on minimum error assumption, transition matrix is obtained from machine tool coordinate system to the cutting tool coordinate system and changing rule of comprehensive error in different position and direction is gained in two-axis motion worktable. Laser interferometer is used to measure the geometric error of polishing platform, it is found that different feed rate and measured spacing had no significant effect on the positioning error of moving axis and positioning error rather than the straightness and angle error has more significant influence on the accuracy of machine tool. Compensation experiment was conducted based on integrated error model, the x-axis and z-axis positioning error was reduced by 87.37% and 90.32% after compensation and the compensation result is remarkable.\",\"PeriodicalId\":14170,\"journal\":{\"name\":\"International Journal of Nanomanufacturing\",\"volume\":\"13 1\",\"pages\":\"371\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-10-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Nanomanufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1504/IJNM.2017.10008421\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Nanomanufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1504/IJNM.2017.10008421","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 1

摘要

四轴抛光平台在加工复杂的光学自由曲面中起着重要作用,其运动误差通常决定着该平台所加工光学自由曲面的精度。基于齐次坐标变换理论,对抛光平台的运动学进行了分析,建立了运动学综合模型的误差。基于最小误差假设,得到了机床坐标系到刀具坐标系的转换矩阵,得到了双轴运动工作台在不同位置和方向上综合误差的变化规律。利用激光干涉仪测量抛光平台的几何误差,发现不同的进给速度和测量间距对移动轴的定位误差没有显著影响,定位误差对机床精度的影响比直线度和角度误差更大。基于集成误差模型进行了补偿实验,补偿后的x轴和z轴定位误差分别降低了87.37%和90.32%,补偿效果显著。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comprehensive error modelling and error compensation for complex optical free-form surface polishing platform
Four-axis polishing platform plays an important role in machining a complex optical free-form surface and the kinematic error generally determine the accuracy of the optical free-form surface fabricated by this platform. This paper analyses kinematics of the polishing platform based on the homogeneous coordinate transformation theory and the error of kinematics synthesis model is established. Based on minimum error assumption, transition matrix is obtained from machine tool coordinate system to the cutting tool coordinate system and changing rule of comprehensive error in different position and direction is gained in two-axis motion worktable. Laser interferometer is used to measure the geometric error of polishing platform, it is found that different feed rate and measured spacing had no significant effect on the positioning error of moving axis and positioning error rather than the straightness and angle error has more significant influence on the accuracy of machine tool. Compensation experiment was conducted based on integrated error model, the x-axis and z-axis positioning error was reduced by 87.37% and 90.32% after compensation and the compensation result is remarkable.
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来源期刊
International Journal of Nanomanufacturing
International Journal of Nanomanufacturing Engineering-Industrial and Manufacturing Engineering
CiteScore
0.60
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0.00%
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