铝微球制备过程中原子有效积累的增强

F. Kamal, M. N. I. Khan
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引用次数: 0

摘要

利用样品几何形状的突然变化,利用电迁移成功地制备了Al微球。实验样品是在样品的过渡区域具有孔的钝化Al线。该孔用于控制积聚和排放过程。通过控制温度和电流密度来增强微球的形成。在样品几何形状的小区域中,原子通量随着沿电子流动方向发生的电流密度的增加而增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Enhancement of Effective Accumulation of Atoms during Fabrication of Al Microsphere
Microspheres of Al have been successfully fabricated utilizing electromigration using sudden change in geometrical shape of a specimen. The experimental sample was a passivated Al line with a hole at the transitional area of the sample. The hole was used to control the accumulation and discharge process. The formation of the microsphere is enhanced by controlling temperature and current density. The atomic flux was increased with the increasing current density that was happened along the electron flow direction in the small region at the geometrical shape of the sample.
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