Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

Abstract. The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air quality monitoring or leakage detection is one of the prominent applications. However, even though there are many different systems already available, the trend goes towards smaller and rather inconspicuous sensors which are embedded in the environment. We present the fabrication and characterization of integrated waveguides, which constitute an interesting platform for absorption spectroscopy in the mid-infrared (mid-IR) using the evanescent field of guided modes interacting with the analyte, thus leading to the absorption-induced attenuation of the mode. Corresponding simulations, characterizing the efficiency of the desired interaction, predict values for the confinement factor Γ and the intrinsic damping D for a waveguide geometry, which is then characterized by measurements. Furthermore, we discuss how these waveguides could be part of an integrated, non-dispersive, mid-IR sensor system fully integrated on a single chip. In this context, we present a way to maintain the quality of waveguides throughout the entire workflow needed to integrate a pyroelectric IR detector based on aluminum nitride (AlN).