利用窗状声子晶体条改善压电激励MEMS谐振器的锚定品质因子

IF 2.7 3区材料科学 Q2 ENGINEERING, MECHANICAL

International Journal of Mechanics and Materials in Design Pub Date : 2023-03-15 DOI:10.1007/s10999-023-09652-x

Thi Dep Ha

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引用次数: 1

摘要

拥有卓越的质量因子(Q)有助于促进微机电系统(MEMS)谐振器的优势，因为它对物联网和射频应用中基于MEMS技术的振荡器和滤波器的性能产生影响。锚定品质因子(\(Q_{\textrm{anchor}}\))是测量MEMS谐振器到衬底的锚定能量损失的主要参数之一，是确定q的主要参数之一。在本文中，提出了一种窗口状声子晶体(PnC)条，即W-PnC，作为弹性波传播的屏障，在硅基氮化铝(ALN)谐振器的支撑系索中。因此，谐振器\(Q_{\textrm{anchor}}\)被高度提升。该W-PnC产生24.11 MHz宽度的带隙(BG)。它覆盖了谐振器的152.5 MHz谐振频率。在\(Q_{\textrm{anchor}}\)改进的对比中，无孔声子晶体(WH-PnC)、带圆短段声子晶体(C-PnC)和四分之一波长声子晶体(L-tether)三种传统支撑结构与W-PnC相对应。通过改变W-PnC的尺寸参数，评估了其带结构中BG形成的变化，为设计人员选择最佳BG提供了平台。数值结果表明，W-PnC谐振腔的\(Q_{\textrm{anchor}}\)性能优于同类谐振腔。具体来说，采用双单元W-PnC所研究的谐振腔的\(Q_{\textrm{anchor}}\)增加了510.90%, 1771.70%, and 1048.51% over the WH-PnC, C-PnC, and L-tether, respectively. The W-PnC demonstrates its high effectiveness over other counterparts in reducing/eliminating the anchor dissipation energy source of the resonator. In addition, the BG properties of the W-PnC, such as gap width and gap location, depend on its dimensional parameters. The finite element analysis based numerical simulation method in this work is performed in COMSOL Multiphysics. The MATLAB scripts then solve the posting process of these simulations.

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Anchor quality factor improvement of a piezoelectrically-excited MEMS resonator using window-like phononic crystal strip

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Anchor quality factor improvement of a piezoelectrically-excited MEMS resonator using window-like phononic crystal strip

Owning a superior quality factor (Q) helps contribute to the advantages of microelectromechanical systems (MEMS) resonators due to its impact on the performance of MEMS technology-based oscillators and filters in IoTs and radio frequency applications. Anchor quality factor (\(Q_{\textrm{anchor}}\)), which measures the anchor energy loss from the MEMS resonators into their substrate, is one of the main parameters in determining Q. In this paper, a window-like phononic crystal (PnC) strip, namely W-PnC, is proposed to act as a barrier of elastic wave propagation in the support tethers of an Aluminium Nitride (ALN)-on-Silicon (Si) resonator. As a result, the resonator \(Q_{\textrm{anchor}}\) is boosted highly. This W-PnC generates a bandgap (BG) with a width of 24.11 MHz. which covers the 152.5 MHz resonant frequency of the resonator. Three traditional support structures, including phononic crystal without hole (WH-PnC), phononic crystal with circle stub (C-PnC), and quarter wavelength (L-tether), are the counterparts of the W-PnC in the comparison of the \(Q_{\textrm{anchor}}\) improvement. By changing the dimensional parameters of the W-PnC, the variation of the BG formation in its band structures is evaluated to provide a platform for the designers in choosing the optimal BGs. The numerical results show that \(Q_{\textrm{anchor}}\) of the resonator with the W-PnC is superior to its counterparts. Specifically, the \(Q_{\textrm{anchor}}\) of the resonator investigated with the two unit cell W-PnC increases 510.90%, 1771.70%, and 1048.51% over the WH-PnC, C-PnC, and L-tether, respectively. The W-PnC demonstrates its high effectiveness over other counterparts in reducing/eliminating the anchor dissipation energy source of the resonator. In addition, the BG properties of the W-PnC, such as gap width and gap location, depend on its dimensional parameters. The finite element analysis based numerical simulation method in this work is performed in COMSOL Multiphysics. The MATLAB scripts then solve the posting process of these simulations.

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来源期刊

International Journal of Mechanics and Materials in Design ENGINEERING, MECHANICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

6.00

自引率

5.40%

发文量

审稿时长

>12 weeks

期刊介绍： It is the objective of this journal to provide an effective medium for the dissemination of recent advances and original works in mechanics and materials'' engineering and their impact on the design process in an integrated, highly focused and coherent format. The goal is to enable mechanical, aeronautical, civil, automotive, biomedical, chemical and nuclear engineers, researchers and scientists to keep abreast of recent developments and exchange ideas on a number of topics relating to the use of mechanics and materials in design. Analytical synopsis of contents: The following non-exhaustive list is considered to be within the scope of the International Journal of Mechanics and Materials in Design: Intelligent Design: Nano-engineering and Nano-science in Design; Smart Materials and Adaptive Structures in Design; Mechanism(s) Design; Design against Failure; Design for Manufacturing; Design of Ultralight Structures; Design for a Clean Environment; Impact and Crashworthiness; Microelectronic Packaging Systems. Advanced Materials in Design: Newly Engineered Materials; Smart Materials and Adaptive Structures; Micromechanical Modelling of Composites; Damage Characterisation of Advanced/Traditional Materials; Alternative Use of Traditional Materials in Design; Functionally Graded Materials; Failure Analysis: Fatigue and Fracture; Multiscale Modelling Concepts and Methodology; Interfaces, interfacial properties and characterisation. Design Analysis and Optimisation: Shape and Topology Optimisation; Structural Optimisation; Optimisation Algorithms in Design; Nonlinear Mechanics in Design; Novel Numerical Tools in Design; Geometric Modelling and CAD Tools in Design; FEM, BEM and Hybrid Methods; Integrated Computer Aided Design; Computational Failure Analysis; Coupled Thermo-Electro-Mechanical Designs.