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洁净室中纳米颗粒物的监测：ISO 14644-12

Q4 Engineering
Journal of the IEST Pub Date : 2019-11-01 DOI:10.17764/1557-2196-62.1.50
Anne Marie Dixon Heathman, D. Ensor
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引用次数: 1

摘要

IEST杂志发表了ISO/TC 209领导人为促进ISO/TC 209标准的推广和教育而发表的一系列外联文章中的第二篇
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Monitoring of Nanoscale Particles in Cleanrooms: ISO 14644-12
The Journal of the IEST presents the second in a series of outreach articles by ISO/TC 209 leaders to foster promotion and education of the expanding body of ISO/TC 209 Standards
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来源期刊
Journal of the IEST
Journal of the IEST Engineering-Safety, Risk, Reliability and Quality
CiteScore
0.40
自引率
0.00%
发文量
0
期刊介绍： The Journal of the IEST is an official publication of the Institute of Environmental Sciences and Technology and is of archival quality and noncommercial in nature. It was established to advance knowledge through technical articles selected by peer review, and has been published for over 50 years as a benefit to IEST members and the technical community at large as as a permanent record of progress in the science and technology of the environmental sciences
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