Lei Feng, Jing-Wei Dong, F. Lai, Jiabin Zheng, Run-Yu Gao, Le-Xing You, Jiangtao Fang, J. Sun
{"title":"镀圆设备的关键技术及接口基础","authors":"Lei Feng, Jing-Wei Dong, F. Lai, Jiabin Zheng, Run-Yu Gao, Le-Xing You, Jiangtao Fang, J. Sun","doi":"10.1360/ssc-2023-0136","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":21640,"journal":{"name":"中国科学(化学)","volume":" ","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Key technologies and interfacial fundamentals of wafer plating equipment\",\"authors\":\"Lei Feng, Jing-Wei Dong, F. Lai, Jiabin Zheng, Run-Yu Gao, Le-Xing You, Jiangtao Fang, J. Sun\",\"doi\":\"10.1360/ssc-2023-0136\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":21640,\"journal\":{\"name\":\"中国科学(化学)\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"中国科学(化学)\",\"FirstCategoryId\":\"1089\",\"ListUrlMain\":\"https://doi.org/10.1360/ssc-2023-0136\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Chemistry\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"中国科学(化学)","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1360/ssc-2023-0136","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Chemistry","Score":null,"Total":0}
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