A combined virtual impactor and field-effect transistor microsystem for particulate matter separation and detection

Ambient suspended particulate matter (PM) (primarily with particle diameter 2.5 µm or less, i.e., PM2.5) can adversely affect ecosystems and human health. Currently, optical particle sensors based on light scattering dominate the portable PM sensing market. However, the light scattering method has poor adaptability to different-sized PM and adverse environmental conditions. Here, we design and develop a portable PM sensing microsystem that consists of a micromachined virtual impactor (VI) for particle separation, a thermophoretic deposition chip for particle collection, and an extended-gate field-effect transistor (FET) for particle analysis. This system can realize on-site separation, collection, and analysis of aerosol particles without being influenced by environmental factors. In this study, the design of the VI is thoroughly analyzed by numerical simulation, and mixtures of different-sized silicon dioxide (SiO2) particles are used in an experimental verification of the performance of the VI and FET. Considering the low cost and compact design of the whole system, the proposed PM analysis microsystem has potential for PM detection under a wide range of conditions, such as heavily polluted industrial environments and for point-of-need outdoor and indoor air quality monitoring.