分子束外延法优化La2−xSrxCuO4单晶薄膜生长

IF 1.9 Q3 PHYSICS, CONDENSED MATTER
Xi He, Xiaotao Xu, Xiaoyan Shi, I. Božović
{"title":"分子束外延法优化La2−xSrxCuO4单晶薄膜生长","authors":"Xi He, Xiaotao Xu, Xiaoyan Shi, I. Božović","doi":"10.3390/condmat8010013","DOIUrl":null,"url":null,"abstract":"Atomic layer-by-layer molecular beam epitaxy (ALL-MBE) combined with ozone is one of the best methods to fabricate single-crystal thin films of complex oxides. Cuprate such as La2−xSrxCuO4 (LSCO) is a representative complex-oxide high-temperature superconductor (HTS) material. Our group utilizes this method to produce high-quality single-crystal HTS films with atomically smooth surfaces and interfaces. In addition, ALL-MBE enables us to engineer multilayer heterostructures with atomic precision. This allows the fabrication of tunnel junctions, various nanostructures, and other HTS devices of interest for superconducting electronics. We have synthesized over three thousand LSCO thin films in the past two decades. These films’ structural and electronic properties have been studied and characterized by various methods. Here, we distill the extensive experience we accumulated into a step-by-step protocol to fabricate atomically perfect LSCO films. The recipe includes substrate preparation, ozone generation and distillation, source calibration, the in situ monitoring of the film synthesis, post-growth annealing, and ex situ characterization. It discloses a reproducible way to fabricate single-crystal LSCO films for basic research and HTS electronic applications.","PeriodicalId":10665,"journal":{"name":"Condensed Matter","volume":" ","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2023-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Optimization of La2−xSrxCuO4 Single Crystal Film Growth via Molecular Beam Epitaxy\",\"authors\":\"Xi He, Xiaotao Xu, Xiaoyan Shi, I. Božović\",\"doi\":\"10.3390/condmat8010013\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Atomic layer-by-layer molecular beam epitaxy (ALL-MBE) combined with ozone is one of the best methods to fabricate single-crystal thin films of complex oxides. Cuprate such as La2−xSrxCuO4 (LSCO) is a representative complex-oxide high-temperature superconductor (HTS) material. Our group utilizes this method to produce high-quality single-crystal HTS films with atomically smooth surfaces and interfaces. In addition, ALL-MBE enables us to engineer multilayer heterostructures with atomic precision. This allows the fabrication of tunnel junctions, various nanostructures, and other HTS devices of interest for superconducting electronics. We have synthesized over three thousand LSCO thin films in the past two decades. These films’ structural and electronic properties have been studied and characterized by various methods. Here, we distill the extensive experience we accumulated into a step-by-step protocol to fabricate atomically perfect LSCO films. The recipe includes substrate preparation, ozone generation and distillation, source calibration, the in situ monitoring of the film synthesis, post-growth annealing, and ex situ characterization. It discloses a reproducible way to fabricate single-crystal LSCO films for basic research and HTS electronic applications.\",\"PeriodicalId\":10665,\"journal\":{\"name\":\"Condensed Matter\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2023-01-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Condensed Matter\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3390/condmat8010013\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Condensed Matter","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3390/condmat8010013","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 2

摘要

原子逐层分子束外延(ALL-MBE)与臭氧相结合是制备复杂氧化物单晶薄膜的最佳方法之一。铜酸盐如La2−xSrxCuO4(LSCO)是一种具有代表性的复合氧化物高温超导体(HTS)材料。我们的团队利用这种方法生产出具有原子级光滑表面和界面的高质量单晶HTS薄膜。此外,ALL-MBE使我们能够以原子精度设计多层异质结构。这允许制造隧道结、各种纳米结构和超导电子领域感兴趣的其他HTS器件。在过去的二十年里,我们已经合成了3000多个LSCO薄膜。这些薄膜的结构和电子性能已经通过各种方法进行了研究和表征。在这里,我们将积累的丰富经验提炼成一个循序渐进的方案,以制造原子级完美的LSCO薄膜。该配方包括衬底制备、臭氧生成和蒸馏、源校准、膜合成的原位监测、生长后退火和非原位表征。它公开了一种用于基础研究和HTS电子应用的可重复制备单晶LSCO膜的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimization of La2−xSrxCuO4 Single Crystal Film Growth via Molecular Beam Epitaxy
Atomic layer-by-layer molecular beam epitaxy (ALL-MBE) combined with ozone is one of the best methods to fabricate single-crystal thin films of complex oxides. Cuprate such as La2−xSrxCuO4 (LSCO) is a representative complex-oxide high-temperature superconductor (HTS) material. Our group utilizes this method to produce high-quality single-crystal HTS films with atomically smooth surfaces and interfaces. In addition, ALL-MBE enables us to engineer multilayer heterostructures with atomic precision. This allows the fabrication of tunnel junctions, various nanostructures, and other HTS devices of interest for superconducting electronics. We have synthesized over three thousand LSCO thin films in the past two decades. These films’ structural and electronic properties have been studied and characterized by various methods. Here, we distill the extensive experience we accumulated into a step-by-step protocol to fabricate atomically perfect LSCO films. The recipe includes substrate preparation, ozone generation and distillation, source calibration, the in situ monitoring of the film synthesis, post-growth annealing, and ex situ characterization. It discloses a reproducible way to fabricate single-crystal LSCO films for basic research and HTS electronic applications.
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来源期刊
Condensed Matter
Condensed Matter PHYSICS, CONDENSED MATTER-
CiteScore
2.90
自引率
11.80%
发文量
58
审稿时长
10 weeks
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