真实轴对称静电镜轨迹分析的焦点CPM软件:方法和算法

Q3 Engineering
Z. Sautbekova
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引用次数: 0

摘要

解决了研究电子镜设计特征,特别是电极间隙对其电子光学特性影响的问题。本文介绍了一种结合解析法和数值法优点的求解方法。本文介绍了作者开发的FOCUS CPM软件,实现了所描述的方法。以三电极反射镜为例,对计算精度进行了估计。计算并分析了焦点位置与圆柱形电极间隙宽度的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
FOCUS CPM SOFTWARE FOR TRAJECTORY ANALYSIS OF REAL AXIALLY SYMMETRIC ELECTROSTATIC MIRRORS: METHODS AND ALGORITHMS
The problem of studying the influence of electron mirrors design features, in particular, the gaps between the electrodes on their electron-optical characteristics is solved. A method to solve the problem that combines the advantages of analytical paraxial and numerical approaches is described. FOCUS CPM software developed by the authors of the work that implements the method described is presented. Calculation accuracy is estimated using the example of a three-electrode mirror. A focus position as a function of gap width between cylindrical electrodes is calculated and analyzed.
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CiteScore
1.10
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0.00%
发文量
15
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