用于机械性能高通量表征的薄膜微拉伸测试结构

IF 3.784 3区化学 Q1 Chemistry

ACS Combinatorial Science Pub Date : 2020-02-18 DOI:10.1021/acscombsci.9b00182

T. Oellers, V. G. Arigela, C. Kirchlechner, G. Dehm*, A. Ludwig*

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引用次数: 11

摘要

提出了一种快速制备薄膜拉伸试验结构的光刻工艺。该工艺适用于各种物理气相沉积技术，可用于组合制造薄膜拉伸测试结构材料库，以实现机械性能的高通量表征。用Cu拉伸测试结构证明了制造工艺的功能性和对这些结构进行高质量测量的可行性。此外，还演示了从一元结构到具有组合变化的库的可扩展性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties

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Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties

A photolithographic process for the rapid fabrication of thin-film tensile-test structures is presented. The process is applicable to various physical vapor deposition techniques and can be used for the combinatorial fabrication of thin film tensile test structure materials libraries for the high throughput characterization of mechanical properties. The functionality of the fabrication process and the feasibility of performing high-quality measurements with these structures is demonstrated with Cu tensile-test structures. In addition, the scalability from unary structures to libraries with compositional variations is demonstrated.

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来源期刊

ACS Combinatorial Science CHEMISTRY, APPLIED-CHEMISTRY, MEDICINAL

自引率

0.00%

发文量

审稿时长

1 months

期刊介绍： The Journal of Combinatorial Chemistry has been relaunched as ACS Combinatorial Science under the leadership of new Editor-in-Chief M.G. Finn of The Scripps Research Institute. The journal features an expanded scope and will build upon the legacy of the Journal of Combinatorial Chemistry, a highly cited leader in the field.