SiC涂层微观结构对其红外发射率的影响

IF 2.2 4区材料科学 Q2 MATERIALS SCIENCE, CERAMICS

Journal of Asian Ceramic Societies Pub Date : 2022-12-28 DOI:10.1080/21870764.2022.2159952

Jiabao Liu, Zhaofeng Chen, Lixia Yang, P. Chai, Qiang Wan

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引用次数: 1

摘要

摘要红外测温广泛应用于MOCVD工艺中，提高石墨基体表面红外发射率有利于提高测温精度。在本研究中，采用不同的工艺参数，包括CVD温度、总压力、H2/MTS比，在石墨基底上通过CVD制备了SiC涂层。研究了不同微结构SiC涂层的红外发射率。所获得的SiC涂层均为β-SiC。具有不同表面形貌的三个样品的红外发射率分别为0.93、0.95和0.97。随着表面粗糙度的增加，热辐射电磁波的反射和散射增加，导致红外发射率更高。晶粒表面疏松的结构使表面电磁波与光波共振耦合，从而提高了红外发射率。

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The effect of SiC coatings microstructure on their infrared emissivity

ABSTRACT Infrared temperature measurement is widely used in the MOCVD process, and improving the surface infrared emissivity of the graphite base is beneficial to improve the temperature measurement accuracy. In this study, SiC coatings were prepared by CVD on graphite substrate using different process parameters including CVD temperature, total pressure, H2/MTS ratio. The infrared emissivity of SiC coatings with different microstructures was investigated. All SiC coatings obtained were β-SiC. The infrared emissivities of the three samples with different surface morphologies are 0.93, 0.95 and 0.97, respectively. As the surface roughness increases, the reflection and scattering of thermally radiated electromagnetic waves increases, resulting in higher infrared emissivity. The loose structure of the grain surface makes the surface electromagnetic wave and light wave resonant coupling, thus increasing the infrared emissivity.

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来源期刊

Journal of Asian Ceramic Societies Materials Science-Ceramics and Composites

CiteScore

5.00

自引率

4.30%

发文量

审稿时长

10 weeks

期刊介绍： The Journal of Asian Ceramic Societies is an open access journal publishing papers documenting original research and reviews covering all aspects of science and technology of Ceramics, Glasses, Composites, and related materials. These papers include experimental and theoretical aspects emphasizing basic science, processing, microstructure, characteristics, and functionality of ceramic materials. The journal publishes high quality full papers, letters for rapid publication, and in-depth review articles. All papers are subjected to a fair peer-review process.