利用光学涡旋光束微细加工金薄膜

IF 0.8 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Laser Micro Nanoengineering Pub Date : 2019-04-01 DOI:10.2961/JLMN.2019.01.0006

S. Kawagoe, R. Nakamura, R. Tasaki, H. Oshima, M. Higashihata, D. Nakamura, T. Omatsu

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引用次数: 3

摘要

利用具有轨道角动量(OAM)的纳秒级光涡旋脉冲照射金薄膜，制备了金微针结构。形成了旋光涡旋旋向的旋光微针。熔融金膜的部分液体运动和OAM传递效应是形成扭曲金微针的主要原因。在扭曲柱上也实现了一个金微球。由于激光通量、膜厚等非优化条件和光涡旋不可避免的缺陷，采用皮秒光涡旋脉冲辐照制备非扭曲结构。

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Microfabrication of Au Film Using Optical Vortex Beam

We fabricate Au microneedle structures by irradiating nanosecond optical vortex pulse, possessing orbital angular momentum (OAM), to Au thin film. Twisted microneedle associated with the handedness of optical vortex is formed. The partial liquid motion of the molten Au film and the OAM transfer effects play a role to establish a twisted Au microneedle. An Au microsphere on a twisted pillar is also achieved. Non-twisted structure is fabricated with picosecond optical vortex pulse irradiation due to unoptimized condition such as laser fluence, film thickness and unavoidable imperfections of the optical vortex.

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来源期刊

Journal of Laser Micro Nanoengineering 工程技术-材料科学：综合

CiteScore

1.90

自引率

9.10%

发文量

审稿时长

3 months

期刊介绍： Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge. JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.