压电双晶MEMS扬声器

IF 3.5 3区工程技术 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering Pub Date : 2022-09-01 DOI:10.1063/10.0013406

Yiming Lang, Chengze Liu, Ahmed Fawzy, Chen Sun, Shaobo Gong, Menglun Zhang

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引用次数: 5

摘要

MEMS扬声器的关键要求之一是增加声压级（SPL），同时保持尽可能小的尺寸。在本文中，我们提出了一种基于压电双晶悬臂的MEMS扬声器，该扬声器比传统的单晶悬臂扬声器产生更高的SPL。有源隔膜尺寸为1.4×1.4 mm2。双压电晶片悬臂并联连接，以充分利用驱动电压。在驱动电压为10Vrms的711耳朵模拟器中，在1kHz时，在10kHz的谐振频率下，测量的SPL达到73dB，并且峰值SPL达到102dB。MEMS扬声器的总谐波失真在100Hz到20kHz的范围内小于3%。尽管绝对SPL不是最高的，但这项工作为所有压电MEMS扬声器提供了更好的SPL。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Piezoelectric bimorph MEMS speakers

One of the key requirements for MEMS speakers is to increase the sound pressure level (SPL) while keeping the size as small as possible. In this paper we present a MEMS speaker based on piezoelectric bimorph cantilevers that produces a higher SPL than conventional unimorph cantilever speakers. The active diaphragm size is 1.4 × 1.4 mm2. The bimorph cantilevers are connected in parallel to make full use of the actuation voltage. At 1 kHz, the measured SPL reached 73 dB and the peak SPL reached 102 dB at the resonance frequency of 10 kHz in a 711 ear simulator under a driving voltage of 10 Vrms. The total harmonic distortion of the MEMS speaker was less than 3% in the range from 100 Hz to 20 kHz. Although the absolute SPL was not the highest, this work provides a better SPL for all piezoelectric MEMS speakers.

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