LS-WEDT表面粗糙度速度参数的实验研究及其在微电极制作中的应用

Q3 Engineering
Y. Gong, Yao Sun, Xiaoteng Ma
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引用次数: 0

摘要

当微加工技术成为现代工业的热点问题时,对微电极的需求大大增加。电火花加工工艺的非接触性使其在微电极制造方面具有独特的优势。因此,本文提出了一种制作微电极的低速线放电车削(LS-WEDT)方法。首先,讨论了LS-WEDT中涉及的转速(Vn)、进给速度(Vs)和线速(Vw)等速度参数的影响。更重要的是,首次用LS-WEDT成功地制备了直径为58μm的CuW70材料微电极。此外,扫描电子显微镜观察表明,该微电极具有良好的表面质量和高的加工精度,没有隆起和弯曲。此外,在微电极表面可以观察到许多直径小于1μm的微小空隙。最后,能谱仪分析表明,LS-WEDT加工的微电极表面存在锌和氧等杂质元素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An experimental study for evaluating speed parameters on surface roughness of LS-WEDT and its application in fabricating microelectrodes
The demand for microelectrodes has greatly increased when the micromachining techniques have become a hot issue in modern industry. The non-contact of EDM process makes it have the unique superiority in fabricating microelectrodes. Therefore, this paper proposed a low speed wire electrical discharge turning (LS-WEDT) method to fabricate microelectrodes. Firstly, the influence of speed parameters including the rotated speed (Vn), feeding speed (Vs) and wire speed (Vw) involved in LS-WEDT are discussed. More importantly, the microelectrode made of CuW70 material with diameter of 58 μm is firstly and successfully fabricated by LS-WEDT. Furthermore, the scanning electron microscope observations disclosed that the microelectrode has good surface quality and high machining precision without ridges and bending. Besides, many small micro-voids with the diameter less than 1 μm can be observed on the microelectrode surface. Finally, the energy dispersive spectrograph analysis suggested the presence of foreign elements including zinc and oxygen on the microelectrode surface machined by LS-WEDT.
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来源期刊
International Journal of Abrasive Technology
International Journal of Abrasive Technology Engineering-Industrial and Manufacturing Engineering
CiteScore
0.90
自引率
0.00%
发文量
13
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