利用单晶硅样品校准激光膨胀计

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2019-01-01 DOI:10.1080/15599612.2019.1587117

Ines Hamann, J. Sanjuan, R. Spannagel, M. Gohlke, G. Wanner, S. Schuster, F. Guzmán, C. Braxmaier

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引用次数: 5

摘要

温度变化引起的几何尺寸的边际变化会影响光学仪器的性能。高度尺寸稳定的材料可以最大限度地减少这些影响，因为它们提供低热膨胀系数(CTE)。我们的膨胀计，基于外差干涉测量，能够确定范围内的CTE。在这里，我们提出了改进的干涉仪性能，使用角测量通过差分波前传感来纠正倾斜-长度耦合。通过测量单晶硅在285 K下的CTE，对该装置进行了测试。结果与报告值吻合良好，偏差小于1%。

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Laser-dilatometer calibration using a single-crystal silicon sample

Abstract Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)