白光光谱干涉仪等效厚度的非线性相位误差分析

Tong Guo, Qianwen Weng, Bei Luo, Jinping Chen, Xing Fu, Xiaotang Hu
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引用次数: 1

摘要

建立了一种基于Linnik型系统的白光光谱干涉法,通过透明介质精确测量薄膜厚度。在实际工作中,分束器的等效厚度和物镜的失配会导致非线性相位误差。加入透明介质也会增加等效厚度。仿真结果表明,等效厚度对薄膜厚度测量有显著影响。因此,有必要进行波长校正,以提供一个恒定的等效厚度分束器。在实验中,在被测光束中加入一些覆盖玻璃片作为透明介质,然后通过透明介质测试1052.2±0.9 nm的标准薄膜厚度。结果表明,该系统具有纳米级的测量精度,可以通过光路补偿的透明介质测量薄膜厚度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer

A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium. In practical work, the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors. Adding a transparent medium also increases the equivalent thickness. The simulation results show that the equivalent thickness has a significant effect on thin film thickness measurements. Therefore, it is necessary to perform wavelength correction to provide a constant equivalent thickness for beam splitters. In the experiments, some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin film thickness of 1052.2±0.9 nm was tested through the transparent medium. The results demonstrate that our system has a nanometer-level accuracy for thin film thickness measurement through transparent medium with optical path compensation.

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