{"title":"利用浸涂技术制备薄膜晶体管栅极介质和半导体","authors":"Yong-Wan Kim, Young-Geun Ha","doi":"10.3365/kjmm.2023.61.8.581","DOIUrl":null,"url":null,"abstract":"The potential applications of advanced electronic materials in large-area, printable, and flexible electronics have generated significant interest. However, creating high-performance, low-voltage thin-film transistors (TFTs) for these applications remains difficult due to a lack of advanced gate dielectric and semiconductor materials that meet both ease-of-fabrication requirements and high electrical performance. In this study, we present high-performance gate dielectric thin-films, which were fabricated using a facile solution-based technique, and then employed to realize low operating voltage organic and metal oxide semiconductor-based thin-film transistors. The high-k oxide gate dielectrics were produced via a simple dip-coating method, resulting in the formation of thin-oxide layers. These novel oxide gate dielectrics demonstrated exceptional dielectric properties, with large capacitances (up to 430 nF/ cm2), low-level leakage current densities (< 3 × 10-8A/cm2 at 4 V), featureless morphology (rms roughness < 0.36 nm), and high transparency (> 85%). Consequently, these dip-coated gate dielectrics can be incorporated into thin-film transistors, utilizing pentacene as p-type organic semiconductors. Furthermore, by employing dip-coating, indium oxide and indium-gallium-zinc oxide can be utilized as n-type inorganic semiconductors, allowing for the fabrication of low-voltage operation and high-performance inorganic TFTs. The resulting TFTs functioned at ultralow voltages (< ± 2 V) and achieved high transistor performance (hole mobility: 0.28 cm2V-1·s-1, electron mobility: ~2.0 cm2V-1·s-1 and on/off current ratio >105).","PeriodicalId":17894,"journal":{"name":"Korean Journal of Metals and Materials","volume":" ","pages":""},"PeriodicalIF":1.1000,"publicationDate":"2023-08-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Utilizing Dip-Coating to Fabricate Gate Dielectric and Semiconductor for Thin-Film Transistors\",\"authors\":\"Yong-Wan Kim, Young-Geun Ha\",\"doi\":\"10.3365/kjmm.2023.61.8.581\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The potential applications of advanced electronic materials in large-area, printable, and flexible electronics have generated significant interest. However, creating high-performance, low-voltage thin-film transistors (TFTs) for these applications remains difficult due to a lack of advanced gate dielectric and semiconductor materials that meet both ease-of-fabrication requirements and high electrical performance. In this study, we present high-performance gate dielectric thin-films, which were fabricated using a facile solution-based technique, and then employed to realize low operating voltage organic and metal oxide semiconductor-based thin-film transistors. The high-k oxide gate dielectrics were produced via a simple dip-coating method, resulting in the formation of thin-oxide layers. These novel oxide gate dielectrics demonstrated exceptional dielectric properties, with large capacitances (up to 430 nF/ cm2), low-level leakage current densities (< 3 × 10-8A/cm2 at 4 V), featureless morphology (rms roughness < 0.36 nm), and high transparency (> 85%). Consequently, these dip-coated gate dielectrics can be incorporated into thin-film transistors, utilizing pentacene as p-type organic semiconductors. Furthermore, by employing dip-coating, indium oxide and indium-gallium-zinc oxide can be utilized as n-type inorganic semiconductors, allowing for the fabrication of low-voltage operation and high-performance inorganic TFTs. The resulting TFTs functioned at ultralow voltages (< ± 2 V) and achieved high transistor performance (hole mobility: 0.28 cm2V-1·s-1, electron mobility: ~2.0 cm2V-1·s-1 and on/off current ratio >105).\",\"PeriodicalId\":17894,\"journal\":{\"name\":\"Korean Journal of Metals and Materials\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2023-08-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Korean Journal of Metals and Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.3365/kjmm.2023.61.8.581\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Korean Journal of Metals and Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3365/kjmm.2023.61.8.581","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Utilizing Dip-Coating to Fabricate Gate Dielectric and Semiconductor for Thin-Film Transistors
The potential applications of advanced electronic materials in large-area, printable, and flexible electronics have generated significant interest. However, creating high-performance, low-voltage thin-film transistors (TFTs) for these applications remains difficult due to a lack of advanced gate dielectric and semiconductor materials that meet both ease-of-fabrication requirements and high electrical performance. In this study, we present high-performance gate dielectric thin-films, which were fabricated using a facile solution-based technique, and then employed to realize low operating voltage organic and metal oxide semiconductor-based thin-film transistors. The high-k oxide gate dielectrics were produced via a simple dip-coating method, resulting in the formation of thin-oxide layers. These novel oxide gate dielectrics demonstrated exceptional dielectric properties, with large capacitances (up to 430 nF/ cm2), low-level leakage current densities (< 3 × 10-8A/cm2 at 4 V), featureless morphology (rms roughness < 0.36 nm), and high transparency (> 85%). Consequently, these dip-coated gate dielectrics can be incorporated into thin-film transistors, utilizing pentacene as p-type organic semiconductors. Furthermore, by employing dip-coating, indium oxide and indium-gallium-zinc oxide can be utilized as n-type inorganic semiconductors, allowing for the fabrication of low-voltage operation and high-performance inorganic TFTs. The resulting TFTs functioned at ultralow voltages (< ± 2 V) and achieved high transistor performance (hole mobility: 0.28 cm2V-1·s-1, electron mobility: ~2.0 cm2V-1·s-1 and on/off current ratio >105).
期刊介绍:
The Korean Journal of Metals and Materials is a representative Korean-language journal of the Korean Institute of Metals and Materials (KIM); it publishes domestic and foreign academic papers related to metals and materials, in abroad range of fields from metals and materials to nano-materials, biomaterials, functional materials, energy materials, and new materials, and its official ISO designation is Korean J. Met. Mater.