{"title":"在具有重叠栅极-源极接触、漏极-肖特基接触和本征SiGe袋的简单iTFET中增强亚阈值斜率和导通电流。","authors":"Jyi-Tsong Lin, Kuan-Pin Lin, Kai-Ming Cheng","doi":"10.1186/s11671-023-03904-7","DOIUrl":null,"url":null,"abstract":"<div><p>In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (<i>S.S</i>) and high <i>I</i><sub>ON</sub> current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the <i>I</i><sub>ON</sub> current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of <i>S.S</i><sub>avg</sub> = 16.2 mV/Dec and <i>S.S</i><sub>min</sub> = 4.62 mV/Dec, respectively. At <i>V</i><sub>D</sub> = 0.2 V, the <i>I</i><sub>ON</sub> current is 1.81 <span>\\(\\times\\)</span> 10<sup>–6</sup> A/μm, and the <i>I</i><sub>ON</sub>/<i>I</i><sub>OFF</sub> ratio is 1.34 <span>\\(\\times\\)</span> 10<sup>9</sup>. The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications.</p></div>","PeriodicalId":715,"journal":{"name":"Nanoscale Research Letters","volume":"18 1","pages":""},"PeriodicalIF":4.7030,"publicationDate":"2023-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10541387/pdf/","citationCount":"0","resultStr":"{\"title\":\"Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket\",\"authors\":\"Jyi-Tsong Lin, Kuan-Pin Lin, Kai-Ming Cheng\",\"doi\":\"10.1186/s11671-023-03904-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (<i>S.S</i>) and high <i>I</i><sub>ON</sub> current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the <i>I</i><sub>ON</sub> current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of <i>S.S</i><sub>avg</sub> = 16.2 mV/Dec and <i>S.S</i><sub>min</sub> = 4.62 mV/Dec, respectively. At <i>V</i><sub>D</sub> = 0.2 V, the <i>I</i><sub>ON</sub> current is 1.81 <span>\\\\(\\\\times\\\\)</span> 10<sup>–6</sup> A/μm, and the <i>I</i><sub>ON</sub>/<i>I</i><sub>OFF</sub> ratio is 1.34 <span>\\\\(\\\\times\\\\)</span> 10<sup>9</sup>. The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications.</p></div>\",\"PeriodicalId\":715,\"journal\":{\"name\":\"Nanoscale Research Letters\",\"volume\":\"18 1\",\"pages\":\"\"},\"PeriodicalIF\":4.7030,\"publicationDate\":\"2023-09-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10541387/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nanoscale Research Letters\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://link.springer.com/article/10.1186/s11671-023-03904-7\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanoscale Research Letters","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1186/s11671-023-03904-7","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (S.S) and high ION current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the ION current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of S.Savg = 16.2 mV/Dec and S.Smin = 4.62 mV/Dec, respectively. At VD = 0.2 V, the ION current is 1.81 \(\times\) 10–6 A/μm, and the ION/IOFF ratio is 1.34 \(\times\) 109. The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications.
期刊介绍:
Nanoscale Research Letters (NRL) provides an interdisciplinary forum for communication of scientific and technological advances in the creation and use of objects at the nanometer scale. NRL is the first nanotechnology journal from a major publisher to be published with Open Access.