一个简单和可扩展的途径,以晶圆尺寸的图案石墨烯。

Li-Hong Liu, Gilad Zorn, David G Castner, Raj Solanki, Michael M Lerner, Mingdi Yan
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引用次数: 82

摘要

制备具有可控图案的大规模石墨烯薄膜是石墨烯基纳米器件制造的重要组成部分。目前制备石墨烯图案的方法要么成本高,要么采用低通量的图案工艺,要么使用复杂的仪器,这阻碍了它们的大规模制造和实际应用。我们报告了一种简单、有效和可重复的方法,用于具有可控特征尺寸和形状的石墨烯薄膜的图像化。这些图案是用一种多功能的光偶化学产生的。从微米到厘米的特征是用传统的光刻工艺制造的。该方法简单,通用,适用于各种衬底,包括硅片,玻璃载玻片和金属薄膜。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

A simple and scalable route to wafer-size patterned graphene.

A simple and scalable route to wafer-size patterned graphene.

A simple and scalable route to wafer-size patterned graphene.

A simple and scalable route to wafer-size patterned graphene.

Producing large-scale graphene films with controllable patterns is an essential component of graphene-based nanodevice fabrication. Current methods of graphene pattern preparation involve either high cost, low throughput patterning processes or sophisticated instruments, hindering their large-scale fabrication and practical applications. We report a simple, effective, and reproducible approach for patterning graphene films with controllable feature sizes and shapes. The patterns were generated using a versatile photocoupling chemistry. Features from micrometres to centimetres were fabricated using a conventional photolithography process. This method is simple, general, and applicable to a wide range of substrates including silicon wafers, glass slides, and metal films.

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来源期刊
Journal of Materials Chemistry
Journal of Materials Chemistry 工程技术-材料科学:综合
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