高织构和透明的RF溅射Eu2O3掺杂ZnO薄膜。

Nano reviews Pub Date : 2015-03-11 eCollection Date: 2015-01-01 DOI:10.3402/nano.v6.26759
Remadevi Sreeja Sreedharan, Vedachalaiyer Ganesan, Chellappan Pillai Sudarsanakumar, Kaushalkumar Bhavsar, Radhakrishna Prabhu, Vellara Pappukutty Pillai Mahadevan Pillai
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引用次数: 28

摘要

背景:氧化锌(ZnO)是一种宽,直接带隙II-VI氧化物半导体。ZnO在室温下具有较大的激子结合能,是获得各种稀土离子可见光和红外发射的良好载体材料。方法:采用射频磁控溅射技术在石英衬底上制备氧化铕(Eu2O3)掺杂ZnO薄膜,掺杂浓度分别为0、0.5、1、3和5 wt%。薄膜在773 K的空气中退火2小时。利用x射线衍射(XRD)、微拉曼光谱、原子力显微镜、紫外-可见光谱和光致发光(PL)光谱对退火膜进行了表征。结果:XRD谱图表明,薄膜呈高c轴取向,呈现ZnO的六方纤锌矿结构。利用Debye-Scherrer公式计算的颗粒尺寸表明,平均晶体尺寸在15-22 nm之间,显示了薄膜的纳米结构性质。在拉曼光谱中观察到的低频和高频E2模式支持ZnO在薄膜中的六方纤锌矿结构。Eu2O3掺杂膜的表面形貌呈现致密的晶粒分布。薄膜在可见光区显示出良好的透明度。利用Tauc情节模型对薄膜的带隙进行了评价。光学常数,如折射率,介电常数,损耗因子,等等都是用透射率数据计算出来的。PL光谱显示紫外和可见光发射。结论:采用射频磁控溅射技术制备了具有高纹理、透明、发光的Eu2O3掺杂ZnO薄膜。该薄膜具有良好的光学性能和结构性能,在紫外和可见光区域发出强烈的发光,表明其适合光电应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Highly textured and transparent RF sputtered Eu2O3 doped ZnO films.

Highly textured and transparent RF sputtered Eu2O3 doped ZnO films.

Highly textured and transparent RF sputtered Eu2O3 doped ZnO films.

Highly textured and transparent RF sputtered Eu2O3 doped ZnO films.

Background : Zinc oxide (ZnO) is a wide, direct band gap II-VI oxide semiconductor. ZnO has large exciton binding energy at room temperature, and it is a good host material for obtaining visible and infrared emission of various rare-earth ions. Methods : Europium oxide (Eu2O3) doped ZnO films are prepared on quartz substrate using radio frequency (RF) magnetron sputtering with doping concentrations 0, 0.5, 1, 3 and 5 wt%. The films are annealed in air at a temperature of 773 K for 2 hours. The annealed films are characterized using X-ray diffraction (XRD), micro-Raman spectroscopy, atomic force microscopy, ultraviolet (UV)-visible spectroscopy and photoluminescence (PL) spectroscopy. Results : XRD patterns show that the films are highly c-axis oriented exhibiting hexagonalwurtzite structure of ZnO. Particle size calculations using Debye-Scherrer formula show that average crystalline size is in the range 15-22 nm showing the nanostructured nature of the films. The observation of low- and high-frequency E2 modes in the Raman spectra supports the hexagonal wurtzite structure of ZnO in the films. The surface morphology of the Eu2O3 doped films presents dense distribution of grains. The films show good transparency in the visible region. The band gaps of the films are evaluated using Tauc plot model. Optical constants such as refractive index, dielectric constant, loss factor, and so on are calculated using the transmittance data. The PL spectra show both UV and visible emissions. Conclusion : Highly textured, transparent, luminescent Eu2O3 doped ZnO films have been synthesized using RF magnetron sputtering. The good optical and structural properties and intense luminescence in the ultraviolet and visible regions from the films suggest their suitability for optoelectronic applications.

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