用于质量传感应用的单片fbar cmos振荡器阵列。

Digest of technical papers. International Conference on Solid-State Sensors, Actuators, and Microsystems Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285771

M L Johnston, I Kymissis, K L Shepard

{"title":"用于质量传感应用的单片fbar cmos振荡器阵列。","authors":"M L Johnston, I Kymissis, K L Shepard","doi":"10.1109/SENSOR.2009.5285771","DOIUrl":null,"url":null,"abstract":"We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an effective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limitations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 × 4 array atop a 0.18μm CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.","PeriodicalId":88859,"journal":{"name":"Digest of technical papers. International Conference on Solid-State Sensors, Actuators, and Microsystems","volume":"2009 ","pages":"1626-1629"},"PeriodicalIF":0.0000,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/SENSOR.2009.5285771","citationCount":"4","resultStr":"{\"title\":\"AN ARRAY OF MONOLITHIC FBAR-CMOS OSCILLATORS FOR MASS-SENSING APPLICATIONS.\",\"authors\":\"M L Johnston, I Kymissis, K L Shepard\",\"doi\":\"10.1109/SENSOR.2009.5285771\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an effective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limitations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 × 4 array atop a 0.18μm CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.\",\"PeriodicalId\":88859,\"journal\":{\"name\":\"Digest of technical papers. International Conference on Solid-State Sensors, Actuators, and Microsystems\",\"volume\":\"2009 \",\"pages\":\"1626-1629\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/SENSOR.2009.5285771\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of technical papers. International Conference on Solid-State Sensors, Actuators, and Microsystems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2009.5285771\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of technical papers. International Conference on Solid-State Sensors, Actuators, and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2009.5285771","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

我们提出了一种用于质量传感应用的单片，坚固安装的CMOS-FBAR振荡器阵列。薄膜体声谐振器(FBAR)是灵敏的生物和化学检测的有效平台，其高工作频率使其灵敏度比石英晶体微天平高许多倍。通过与CMOS驱动电路的单片集成，我们的目标是克服外部耦合谐振器的空间限制，在没有专门制造技术的情况下构建密集的传感器阵列。该传感器在0.18μm CMOS有源衬底上构建为6 × 4阵列，其质量灵敏度可与片外FBAR传感器相媲美。

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AN ARRAY OF MONOLITHIC FBAR-CMOS OSCILLATORS FOR MASS-SENSING APPLICATIONS.

We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an effective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limitations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 × 4 array atop a 0.18μm CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.

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Digest of technical papers. International Conference on Solid-State Sensors, Actuators, and Microsystems

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