{"title":"接触电阻在石墨烯场效应器件中的作用","authors":"Filippo Giubileo , Antonio Di Bartolomeo","doi":"10.1016/j.progsurf.2017.05.002","DOIUrl":null,"url":null,"abstract":"<div><p>The extremely high carrier mobility<span><span> and the unique band structure, make graphene very useful for field-effect transistor applications. According to several works, the primary limitation to graphene based transistor performance is not related to the material quality, but to extrinsic factors that affect the electronic transport properties. One of the most important parasitic element is the contact resistance appearing between graphene and the metal electrodes functioning as the source and the drain. Ohmic contacts to graphene, with low contact resistances, are necessary for injection and extraction of majority charge carriers to prevent transistor parameter fluctuations caused by variations of the contact resistance. The International Technology Roadmap for Semiconductors, toward integration and down-scaling of graphene electronic devices, identifies as a challenge the development of a CMOS compatible process that enables reproducible formation of low contact resistance. However, the contact resistance is still not well understood despite it is a crucial barrier towards further improvements. In this paper, we review the experimental and theoretical activity that in the last decade has been focusing on the reduction of the contact resistance in graphene transistors. We will summarize the specific properties of graphene-metal contacts with particular attention to the nature of metals, impact of fabrication process, </span>Fermi level pinning, interface modifications induced through surface processes, charge transport mechanism, and edge contact formation.</span></p></div>","PeriodicalId":416,"journal":{"name":"Progress in Surface Science","volume":"92 3","pages":"Pages 143-175"},"PeriodicalIF":8.7000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.progsurf.2017.05.002","citationCount":"183","resultStr":"{\"title\":\"The role of contact resistance in graphene field-effect devices\",\"authors\":\"Filippo Giubileo , Antonio Di Bartolomeo\",\"doi\":\"10.1016/j.progsurf.2017.05.002\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The extremely high carrier mobility<span><span> and the unique band structure, make graphene very useful for field-effect transistor applications. 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引用次数: 183
摘要
极高的载流子迁移率和独特的能带结构使石墨烯在场效应晶体管应用中非常有用。根据一些研究,石墨烯基晶体管性能的主要限制与材料质量无关,而是与影响电子输运性质的外在因素有关。最重要的寄生元件之一是石墨烯与作为源极和漏极的金属电极之间的接触电阻。与石墨烯的欧姆接触具有低接触电阻,对于注入和提取大多数电荷载流子是必要的,以防止由于接触电阻变化引起的晶体管参数波动。国际半导体技术路线图(International Technology Roadmap for Semiconductors)正朝着石墨烯电子器件的集成化和缩小尺寸的方向发展,该路线图认为开发一种CMOS兼容工艺是一项挑战,该工艺能够再现低接触电阻的形成。然而,接触电阻仍然没有得到很好的理解,尽管它是进一步改进的关键障碍。在本文中,我们回顾了在过去十年中一直关注于石墨烯晶体管接触电阻降低的实验和理论活动。我们将总结石墨烯-金属接触的具体性质,特别关注金属的性质、制造工艺的影响、费米水平钉住、表面工艺引起的界面修饰、电荷传输机制和边缘接触的形成。
The role of contact resistance in graphene field-effect devices
The extremely high carrier mobility and the unique band structure, make graphene very useful for field-effect transistor applications. According to several works, the primary limitation to graphene based transistor performance is not related to the material quality, but to extrinsic factors that affect the electronic transport properties. One of the most important parasitic element is the contact resistance appearing between graphene and the metal electrodes functioning as the source and the drain. Ohmic contacts to graphene, with low contact resistances, are necessary for injection and extraction of majority charge carriers to prevent transistor parameter fluctuations caused by variations of the contact resistance. The International Technology Roadmap for Semiconductors, toward integration and down-scaling of graphene electronic devices, identifies as a challenge the development of a CMOS compatible process that enables reproducible formation of low contact resistance. However, the contact resistance is still not well understood despite it is a crucial barrier towards further improvements. In this paper, we review the experimental and theoretical activity that in the last decade has been focusing on the reduction of the contact resistance in graphene transistors. We will summarize the specific properties of graphene-metal contacts with particular attention to the nature of metals, impact of fabrication process, Fermi level pinning, interface modifications induced through surface processes, charge transport mechanism, and edge contact formation.
期刊介绍:
Progress in Surface Science publishes progress reports and review articles by invited authors of international stature. The papers are aimed at surface scientists and cover various aspects of surface science. Papers in the new section Progress Highlights, are more concise and general at the same time, and are aimed at all scientists. Because of the transdisciplinary nature of surface science, topics are chosen for their timeliness from across the wide spectrum of scientific and engineering subjects. The journal strives to promote the exchange of ideas between surface scientists in the various areas. Authors are encouraged to write articles that are of relevance and interest to both established surface scientists and newcomers in the field.