(111)Cu/Sn/Ni微接头(Cu,Ni)6Sn5界面在等温和tg键合下的演化及剪切性能研究

IF 4.8 2区 材料科学 Q2 CHEMISTRY, PHYSICAL
Yanqing Lai, Ning Zhao
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引用次数: 8

摘要

单晶铜在先进封装的键合技术中具有作为衬垫或微凸点的潜力。采用额外温度梯度(TG, TG-键合)的方法,将单晶(111)Cu与多晶Ni衬底以Sn为中间层进行键合。研究了(111)Cu/Sn/Ni微接头中(Cu,Ni)6Sn5金属间化合物(IMC)在等温和tg键合过程中的形态、取向演变、元素分布和生长动力学。在初始Sn/(111)Cu界面处形成以60°夹角沿三个相交方向的规则的(Cu,Ni)6Sn5屋顶型晶粒,并在整个等温键合过程中保持以(112)形式优先取向的屋顶型形貌。对于tg键合,tg诱导的原子热迁移(TM)和Cu-Ni交叉相互作用共同对界面IMCs的形貌、晶粒特征和生长动力学起关键作用。热端为(111)Cu的热端tg键合可以使(Cu,Ni)6Sn5相快速生长,从而制备出比冷端为(111)Cu的热端tg键合具有更高抗剪强度的全IMC接头。所提出的方法将为开发先进封装的键合技术提供进一步的见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Study on the evolution of interfacial (Cu,Ni)6Sn5 and shear property of (111)Cu/Sn/Ni micro joints under isothermal and TG-bonding

Study on the evolution of interfacial (Cu,Ni)6Sn5 and shear property of (111)Cu/Sn/Ni micro joints under isothermal and TG-bonding

Single-crystal Cu can be potentially applied as pad or micro bump in bonding technology for advanced packaging. A novel bonding method with an extra temperature gradient (TG, TG-bonding) was carried out to bonding single-crystal (111)Cu and poly-crystal Ni substrates with Sn as interlayer. The morphology and orientation evolution, elemental distribution and growth kinetics of interfacial (Cu,Ni)6Sn5 intermetallic compound (IMC) in (111)Cu/Sn/Ni micro joints during isothermal and TG-bonding were investigated. Regular roof-type (Cu,Ni)6Sn5 grains along three intersectant directions with an angle of 60° formed at the initial Sn/(111)Cu interface and maintained the roof-type morphology with (1120) preferred orientation throughout the isothermal bonding. For TG-bonding, TG-induced atomic thermomigration (TM) and Cu–Ni cross-interaction co-played a critical role in the morphology, grain feature and growth kinetics of the interfacial IMCs. Moreover, rapid growth of (Cu,Ni)6Sn5 phase was achieved by TG-bonding with (111)Cu as hot end to fabricate full IMC joints which had higher shear strength than the cases of isothermal and TG-bonding with (111)Cu as cold end. The proposed method would provide a further insight for developing bonding technology for advanced packaging.

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来源期刊
Intermetallics
Intermetallics 工程技术-材料科学:综合
CiteScore
7.80
自引率
9.10%
发文量
291
审稿时长
37 days
期刊介绍: This journal is a platform for publishing innovative research and overviews for advancing our understanding of the structure, property, and functionality of complex metallic alloys, including intermetallics, metallic glasses, and high entropy alloys. The journal reports the science and engineering of metallic materials in the following aspects: Theories and experiments which address the relationship between property and structure in all length scales. Physical modeling and numerical simulations which provide a comprehensive understanding of experimental observations. Stimulated methodologies to characterize the structure and chemistry of materials that correlate the properties. Technological applications resulting from the understanding of property-structure relationship in materials. Novel and cutting-edge results warranting rapid communication. The journal also publishes special issues on selected topics and overviews by invitation only.
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