{"title":"半导体工艺中不同来源3003铝合金腐蚀行为变异性的研究","authors":"Yongxiang Liu, Ji Chen, Yang Zhao","doi":"10.1002/maco.202514881","DOIUrl":null,"url":null,"abstract":"<div>\n \n <p>This study investigates the corrosion resistance of 3003 aluminum alloys from different sources used in the semiconductor industry, exploring their behavior in both liquid and gas environments. The corrosion mechanisms were analyzed through microscopic characterization and calculations. The results reveal significant variations in the distribution of particles, with notable differences in the number and area of Al<sub>6</sub>(Mn,Fe) phase. The slightly higher electrochemical potential of the Al<sub>6</sub>(Mn,Fe) phase compared to the matrix was identified as a key factor accelerating corrosion in liquid environments. Additionally, the lower saturation vapor pressure of silicon chloride led to the accumulation of minimal corrosion products on the surface of α-Al<sub>12</sub>(Mn,Fe)<sub>3</sub>Si phase.</p></div>","PeriodicalId":18225,"journal":{"name":"Materials and Corrosion-werkstoffe Und Korrosion","volume":"76 10","pages":"1497-1509"},"PeriodicalIF":2.0000,"publicationDate":"2025-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of the Corrosion Behavior Variability of 3003 Aluminum Alloys From Different Sources in Semiconductor Process\",\"authors\":\"Yongxiang Liu, Ji Chen, Yang Zhao\",\"doi\":\"10.1002/maco.202514881\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div>\\n \\n <p>This study investigates the corrosion resistance of 3003 aluminum alloys from different sources used in the semiconductor industry, exploring their behavior in both liquid and gas environments. The corrosion mechanisms were analyzed through microscopic characterization and calculations. The results reveal significant variations in the distribution of particles, with notable differences in the number and area of Al<sub>6</sub>(Mn,Fe) phase. The slightly higher electrochemical potential of the Al<sub>6</sub>(Mn,Fe) phase compared to the matrix was identified as a key factor accelerating corrosion in liquid environments. Additionally, the lower saturation vapor pressure of silicon chloride led to the accumulation of minimal corrosion products on the surface of α-Al<sub>12</sub>(Mn,Fe)<sub>3</sub>Si phase.</p></div>\",\"PeriodicalId\":18225,\"journal\":{\"name\":\"Materials and Corrosion-werkstoffe Und Korrosion\",\"volume\":\"76 10\",\"pages\":\"1497-1509\"},\"PeriodicalIF\":2.0000,\"publicationDate\":\"2025-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials and Corrosion-werkstoffe Und Korrosion\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/maco.202514881\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials and Corrosion-werkstoffe Und Korrosion","FirstCategoryId":"88","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/maco.202514881","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Study of the Corrosion Behavior Variability of 3003 Aluminum Alloys From Different Sources in Semiconductor Process
This study investigates the corrosion resistance of 3003 aluminum alloys from different sources used in the semiconductor industry, exploring their behavior in both liquid and gas environments. The corrosion mechanisms were analyzed through microscopic characterization and calculations. The results reveal significant variations in the distribution of particles, with notable differences in the number and area of Al6(Mn,Fe) phase. The slightly higher electrochemical potential of the Al6(Mn,Fe) phase compared to the matrix was identified as a key factor accelerating corrosion in liquid environments. Additionally, the lower saturation vapor pressure of silicon chloride led to the accumulation of minimal corrosion products on the surface of α-Al12(Mn,Fe)3Si phase.
期刊介绍：
Materials and Corrosion is the leading European journal in its field, providing rapid and comprehensive coverage of the subject and specifically highlighting the increasing importance of corrosion research and prevention.
Several sections exclusive to Materials and Corrosion bring you closer to the current events in the field of corrosion research and add to the impact this journal can make on your work.
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