基于二阶表面的亚波长波导光耦合器件的双光子激光光刻制备

IF 0.4 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Moscow University Physics Bulletin Pub Date : 2025-08-06 DOI:10.3103/S002713492570064X

I. O. Batuev, K. A. Smirnov, I. I. Tsiniaikin, T. V. Murzina, A. I. Maydykovskiy

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引用次数: 0

摘要

光输入/输出器件是实现光纤器件和光子集成电路之间耦合的关键器件。本文采用双光子激光光刻技术，制备了从表面升起的光波导宽带耦合器，并与数值模拟进行了比较。实验证明，椭球基耦合器最适合将光耦合到波导中。包含两个适配器的系统在光谱范围700-1000 nm的\(s\) -极化辐射的平均透过率至少为27 \(\%\)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Light Coupling Devices for Subwavelength Waveguides Based on Second-Order Surfaces, Fabricated by Two-Photon Laser Lithography

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Light Coupling Devices for Subwavelength Waveguides Based on Second-Order Surfaces, Fabricated by Two-Photon Laser Lithography

Light input/output devices are essential for coupling between bulk and fiber optics devices and photonic integrated circuits (PICs). In this work, broadband couplers for optical waveguides lifted from the surface were fabricated using two-photon laser lithography, and comparison with numerical modelling was carried out. It was demonstrated experimentally that the ellipsoid-based coupler is optimal for coupling light into the waveguide. The average transmittance of a system comprising two adapters in the spectral range 700–1000 nm for \(s\)-polarized radiation amounted to at least 27\(\%\).

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来源期刊

Moscow University Physics Bulletin PHYSICS, MULTIDISCIPLINARY-

CiteScore

0.70

自引率

0.00%

发文量

129

审稿时长

6-12 weeks

期刊介绍： Moscow University Physics Bulletin publishes original papers (reviews, articles, and brief communications) in the following fields of experimental and theoretical physics: theoretical and mathematical physics; physics of nuclei and elementary particles; radiophysics, electronics, acoustics; optics and spectroscopy; laser physics; condensed matter physics; chemical physics, physical kinetics, and plasma physics; biophysics and medical physics; astronomy, astrophysics, and cosmology; physics of the Earth’s, atmosphere, and hydrosphere.