中高频圆柱形电容耦合等离子体源阻抗公式的推导

IF 0.9 4区物理与天体物理 Q3 PHYSICS, MULTIDISCIPLINARY

Journal of the Korean Physical Society Pub Date : 2025-06-02 DOI:10.1007/s40042-025-01404-8

Nam-Sik Yoon

{"title":"中高频圆柱形电容耦合等离子体源阻抗公式的推导","authors":"Nam-Sik Yoon","doi":"10.1007/s40042-025-01404-8","DOIUrl":null,"url":null,"abstract":"<div><p>Analytic impedance formulas of cylindrical capacitively coupled plasma (CCP) sources are derived in a moderately high-frequency range. The frequencies considered in this study are assumed to be within a range where the inductance may be non-negligible, but not too high to excite standing waves or inductive heating modes. The solutions to the Bessel differential equation for the electromagnetic fields, derived from Maxwell’s equations and appropriate assumptions, are determined by the Poynting vector and input current conditions. Based on the obtained electromagnetic fields, impedance formulas are derived through field definition, and the results were numerically analyzed.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 2","pages":"155 - 163"},"PeriodicalIF":0.9000,"publicationDate":"2025-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A derivation of impedance formula of cylindrical capacitively coupled plasma source in moderately high-frequency range\",\"authors\":\"Nam-Sik Yoon\",\"doi\":\"10.1007/s40042-025-01404-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Analytic impedance formulas of cylindrical capacitively coupled plasma (CCP) sources are derived in a moderately high-frequency range. The frequencies considered in this study are assumed to be within a range where the inductance may be non-negligible, but not too high to excite standing waves or inductive heating modes. The solutions to the Bessel differential equation for the electromagnetic fields, derived from Maxwell’s equations and appropriate assumptions, are determined by the Poynting vector and input current conditions. Based on the obtained electromagnetic fields, impedance formulas are derived through field definition, and the results were numerically analyzed.</p></div>\",\"PeriodicalId\":677,\"journal\":{\"name\":\"Journal of the Korean Physical Society\",\"volume\":\"87 2\",\"pages\":\"155 - 163\"},\"PeriodicalIF\":0.9000,\"publicationDate\":\"2025-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Korean Physical Society\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s40042-025-01404-8\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Physical Society","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s40042-025-01404-8","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

在中等高频范围内推导了圆柱电容耦合等离子体源的解析阻抗公式。在本研究中考虑的频率被假设在一个范围内，其中电感可能是不可忽略的，但不是太高激发驻波或感应加热模式。电磁场贝塞尔微分方程的解由麦克斯韦方程组和适当的假设导出，由波印廷矢量和输入电流条件决定。根据得到的电磁场，通过场定义推导出阻抗公式，并对计算结果进行数值分析。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

A derivation of impedance formula of cylindrical capacitively coupled plasma source in moderately high-frequency range

查看原文本刊更多论文

A derivation of impedance formula of cylindrical capacitively coupled plasma source in moderately high-frequency range

Analytic impedance formulas of cylindrical capacitively coupled plasma (CCP) sources are derived in a moderately high-frequency range. The frequencies considered in this study are assumed to be within a range where the inductance may be non-negligible, but not too high to excite standing waves or inductive heating modes. The solutions to the Bessel differential equation for the electromagnetic fields, derived from Maxwell’s equations and appropriate assumptions, are determined by the Poynting vector and input current conditions. Based on the obtained electromagnetic fields, impedance formulas are derived through field definition, and the results were numerically analyzed.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Journal of the Korean Physical Society PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.20

自引率

16.70%

发文量

276

审稿时长

5.5 months

期刊介绍： The Journal of the Korean Physical Society (JKPS) covers all fields of physics spanning from statistical physics and condensed matter physics to particle physics. The manuscript to be published in JKPS is required to hold the originality, significance, and recent completeness. The journal is composed of Full paper, Letters, and Brief sections. In addition, featured articles with outstanding results are selected by the Editorial board and introduced in the online version. For emphasis on aspect of international journal, several world-distinguished researchers join the Editorial board. High quality of papers may be express-published when it is recommended or requested.