激光等离子体化学沉积掺杂固体碳氮化硅涂层

IF 1.4 4区化学 Q4 CHEMISTRY, INORGANIC & NUCLEAR

Journal of Structural Chemistry Pub Date : 2025-06-02 DOI:10.1134/S0022476625050051

V. N. Demin, I. P. Asanov, A. L. Smirnov, M. N. Khomyakov, P. A. Pinaev, S. N. Bagaev

{"title":"激光等离子体化学沉积掺杂固体碳氮化硅涂层","authors":"V. N. Demin, I. P. Asanov, A. L. Smirnov, M. N. Khomyakov, P. A. Pinaev, S. N. Bagaev","doi":"10.1134/S0022476625050051","DOIUrl":null,"url":null,"abstract":"Solid hafnia-doped silicon carbonitride coatings are synthesized using laser plasma in a high-speed argon flow from hexamethyldisilazane (HMDS) Si2NH(CH3)6 and hafnium dipivaloylmethane Hf(dpm)4 vapor mixture. The coatings are characterized by X-ray photoelectron, IR, and Raman spectroscopy techniques. The structural studies are carried out by powder XRD; the coating hardnesses are measured by nanoindentation. The hardness of the coatings synthesized on stainless steel from a HMDS and Hf(dpm)4 mixture is 21-24 GPa at a Hf(dpm)4 concentration of up to 2.5 wt. % and decreases to 7 GPa if the Hf(dpm)4 content increases in a mixture to 4.5 wt. %.","PeriodicalId":668,"journal":{"name":"Journal of Structural Chemistry","volume":"66 5","pages":"921 - 929"},"PeriodicalIF":1.4000,"publicationDate":"2025-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laser Plasma-Chemical Deposition of Hafnia-Doped Solid Silicon Carbonitride Coatings\",\"authors\":\"V. N. Demin, I. P. Asanov, A. L. Smirnov, M. N. Khomyakov, P. A. Pinaev, S. N. Bagaev\",\"doi\":\"10.1134/S0022476625050051\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Solid hafnia-doped silicon carbonitride coatings are synthesized using laser plasma in a high-speed argon flow from hexamethyldisilazane (HMDS) Si2NH(CH3)6 and hafnium dipivaloylmethane Hf(dpm)4 vapor mixture. The coatings are characterized by X-ray photoelectron, IR, and Raman spectroscopy techniques. The structural studies are carried out by powder XRD; the coating hardnesses are measured by nanoindentation. The hardness of the coatings synthesized on stainless steel from a HMDS and Hf(dpm)4 mixture is 21-24 GPa at a Hf(dpm)4 concentration of up to 2.5 wt. % and decreases to 7 GPa if the Hf(dpm)4 content increases in a mixture to 4.5 wt. %.\",\"PeriodicalId\":668,\"journal\":{\"name\":\"Journal of Structural Chemistry\",\"volume\":\"66 5\",\"pages\":\"921 - 929\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2025-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Structural Chemistry\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S0022476625050051\",\"RegionNum\":4,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"CHEMISTRY, INORGANIC & NUCLEAR\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Structural Chemistry","FirstCategoryId":"92","ListUrlMain":"https://link.springer.com/article/10.1134/S0022476625050051","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"CHEMISTRY, INORGANIC & NUCLEAR","Score":null,"Total":0}

引用次数: 0

摘要

以六甲基二矽氮烷（HMDS） Si2NH(CH3)6和铪二戊基甲烷Hf(dpm)4蒸汽混合物为原料，采用激光等离子体在高速氩气流下合成了固体掺杂碳氮化硅涂层。利用x射线光电子、红外和拉曼光谱技术对涂层进行了表征。采用粉末XRD对其结构进行了研究；采用纳米压痕法测定涂层硬度。用HMDS和Hf(dpm)4混合在不锈钢上合成的涂层，当Hf(dpm)4浓度高达2.5 wt. %时，硬度为21-24 GPa，当Hf(dpm)4含量增加到4.5 wt. %时，硬度降至7 GPa。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Laser Plasma-Chemical Deposition of Hafnia-Doped Solid Silicon Carbonitride Coatings

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Laser Plasma-Chemical Deposition of Hafnia-Doped Solid Silicon Carbonitride Coatings

Solid hafnia-doped silicon carbonitride coatings are synthesized using laser plasma in a high-speed argon flow from hexamethyldisilazane (HMDS) Si₂NH(CH₃)₆ and hafnium dipivaloylmethane Hf(dpm)₄ vapor mixture. The coatings are characterized by X-ray photoelectron, IR, and Raman spectroscopy techniques. The structural studies are carried out by powder XRD; the coating hardnesses are measured by nanoindentation. The hardness of the coatings synthesized on stainless steel from a HMDS and Hf(dpm)₄ mixture is 21-24 GPa at a Hf(dpm)₄ concentration of up to 2.5 wt. % and decreases to 7 GPa if the Hf(dpm)₄ content increases in a mixture to 4.5 wt. %.

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来源期刊

Journal of Structural Chemistry 化学-无机化学与核化学

CiteScore

1.60

自引率

12.50%

发文量

142

审稿时长

8.3 months

期刊介绍： Journal is an interdisciplinary publication covering all aspects of structural chemistry, including the theory of molecular structure and chemical bond; the use of physical methods to study the electronic and spatial structure of chemical species; structural features of liquids, solutions, surfaces, supramolecular systems, nano- and solid materials; and the crystal structure of solids.