不同光谱区暴露在电化学蚀刻多孔硅上的结构的光致发光

IF 0.6 4区 工程技术 Q4 ENGINEERING, CHEMICAL
O. V. Semenova, A. Ya. Korets, T. N. Patrusheva, M. Yu. Railko
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引用次数: 0

摘要

本文研究了不同附加辐照源对多孔硅光学性能的影响。在氢氟酸溶液中采用标准电化学阳极氧化(蚀刻)技术从单晶硅片中获得样品。在不同的光谱照射下,观察了三个系列样品的光致发光光谱的差异。结果表明,在电化学刻蚀过程中,通过使用不同类型的附加光源,多孔硅的光致发光光谱峰可以在400 ~ 850 nm的波长范围内调谐。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Photoluminescence of Structures on Porous Silicon Obtained by Electrochemical Etching with Exposure to Light in Different Spectral Regions

Photoluminescence of Structures on Porous Silicon Obtained by Electrochemical Etching with Exposure to Light in Different Spectral Regions

This work focuses on the effect of different additional irradiation sources on the optical properties of porous silicon. Samples were obtained using the standard electrochemical anodization (etching) technique in a hydrofluoric acid solution from monocrystalline silicon wafers. Differences were observed in the photoluminescence spectra of three series of samples subjected to different spectral irradiation. The results show that by using various types of additional light sources during the electrochemical etching process, the photoluminescence spectrum peak of porous silicon can be tuned within the wavelength range of 400–850 nm.

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来源期刊
CiteScore
1.20
自引率
25.00%
发文量
70
审稿时长
24 months
期刊介绍: Theoretical Foundations of Chemical Engineering is a comprehensive journal covering all aspects of theoretical and applied research in chemical engineering, including transport phenomena; surface phenomena; processes of mixture separation; theory and methods of chemical reactor design; combined processes and multifunctional reactors; hydromechanic, thermal, diffusion, and chemical processes and apparatus, membrane processes and reactors; biotechnology; dispersed systems; nanotechnologies; process intensification; information modeling and analysis; energy- and resource-saving processes; environmentally clean processes and technologies.
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