Xidan Ma , Liyuan Wu , Yiyi Li , Nengneng Xue , Feng Gong , Bin Guo , Zhiwen Xie , Yongjun Feng
{"title":"石英玻璃基板上Cr、Ti和Si夹层CrWN-Ru涂层的力学和摩擦学性能研究","authors":"Xidan Ma , Liyuan Wu , Yiyi Li , Nengneng Xue , Feng Gong , Bin Guo , Zhiwen Xie , Yongjun Feng","doi":"10.1016/j.matchemphys.2025.131568","DOIUrl":null,"url":null,"abstract":"<div><div>In light of the potential application of quartz glass as a mould material for precision glass moulding (PGM), this study aims to evaluate the feasibility of employing CrWN–Ru coatings for protective purposes. Particular attention is given to the effect of Cr, Ti and Si interlayers on enhancing the service performance of the CrWN–Ru coating system. CrWN–Ru, Cr/CrWN–Ru, Ti/CrWN–Ru, and Si/CrWN–Ru coatings were deposited on quartz glass substrates using plasma-enhanced magnetron sputtering. A comparative experimental approach was adopted to investigate the mechanical and tribological properties of the four coating systems. The results demonstrate that plasma-enhanced magnetron sputtering enables the fabrication of CrWN–Ru coatings with satisfactory surface quality and structural stability on quartz glass substrates. The introduction of Cr, Ti, and Si interlayers was found to reduce the surface quality of the coatings without altering their preferred crystallographic orientation, while the phase structure remained stable. At the same time, the presence of interlayers enhanced the hardness and Young's modulus of the CrWN–Ru coatings, thereby improving their overall strength–toughness balance. Among the systems examined, the coating with a Cr interlayer exhibited the best performance, achieving the highest hardness (9.35 GPa) and Young's modulus (144.55 GPa), together with superior toughness and film–substrate adhesion. In contrast, the CrWN–Ru coating without an interlayer demonstrated excellent tribological behaviour, with the coefficient of friction and wear rate reaching as low as 0.326 and 1.14 × 10<sup>−7</sup> mm<sup>3</sup>/N·m, respectively. However, the introduction of interlayers was observed to diminish the wear resistance of the CrWN–Ru coatings, and this adverse effect became more pronounced with increasing interlayer thickness. All four CrWN–Ru coatings were found to exhibit a similar wear damage mechanism, which proceeds through the sequence: friction - oxidation - adhesion - abrasive wear - crack formation - delamination. This study provides theoretical guidance for the design, optimisation, and performance tailoring of CrWN–Ru coatings on quartz glass substrates, thereby promoting the application of quartz glass in the field of precision glass moulding.</div></div>","PeriodicalId":18227,"journal":{"name":"Materials Chemistry and Physics","volume":"348 ","pages":"Article 131568"},"PeriodicalIF":4.7000,"publicationDate":"2025-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of the mechanical and tribological properties of CrWN–Ru coatings with Cr, Ti, and Si interlayers on quartz glass substrates\",\"authors\":\"Xidan Ma , Liyuan Wu , Yiyi Li , Nengneng Xue , Feng Gong , Bin Guo , Zhiwen Xie , Yongjun Feng\",\"doi\":\"10.1016/j.matchemphys.2025.131568\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In light of the potential application of quartz glass as a mould material for precision glass moulding (PGM), this study aims to evaluate the feasibility of employing CrWN–Ru coatings for protective purposes. Particular attention is given to the effect of Cr, Ti and Si interlayers on enhancing the service performance of the CrWN–Ru coating system. CrWN–Ru, Cr/CrWN–Ru, Ti/CrWN–Ru, and Si/CrWN–Ru coatings were deposited on quartz glass substrates using plasma-enhanced magnetron sputtering. A comparative experimental approach was adopted to investigate the mechanical and tribological properties of the four coating systems. The results demonstrate that plasma-enhanced magnetron sputtering enables the fabrication of CrWN–Ru coatings with satisfactory surface quality and structural stability on quartz glass substrates. The introduction of Cr, Ti, and Si interlayers was found to reduce the surface quality of the coatings without altering their preferred crystallographic orientation, while the phase structure remained stable. At the same time, the presence of interlayers enhanced the hardness and Young's modulus of the CrWN–Ru coatings, thereby improving their overall strength–toughness balance. Among the systems examined, the coating with a Cr interlayer exhibited the best performance, achieving the highest hardness (9.35 GPa) and Young's modulus (144.55 GPa), together with superior toughness and film–substrate adhesion. In contrast, the CrWN–Ru coating without an interlayer demonstrated excellent tribological behaviour, with the coefficient of friction and wear rate reaching as low as 0.326 and 1.14 × 10<sup>−7</sup> mm<sup>3</sup>/N·m, respectively. However, the introduction of interlayers was observed to diminish the wear resistance of the CrWN–Ru coatings, and this adverse effect became more pronounced with increasing interlayer thickness. All four CrWN–Ru coatings were found to exhibit a similar wear damage mechanism, which proceeds through the sequence: friction - oxidation - adhesion - abrasive wear - crack formation - delamination. This study provides theoretical guidance for the design, optimisation, and performance tailoring of CrWN–Ru coatings on quartz glass substrates, thereby promoting the application of quartz glass in the field of precision glass moulding.</div></div>\",\"PeriodicalId\":18227,\"journal\":{\"name\":\"Materials Chemistry and Physics\",\"volume\":\"348 \",\"pages\":\"Article 131568\"},\"PeriodicalIF\":4.7000,\"publicationDate\":\"2025-09-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Chemistry and Physics\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0254058425012143\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Chemistry and Physics","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0254058425012143","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Investigation of the mechanical and tribological properties of CrWN–Ru coatings with Cr, Ti, and Si interlayers on quartz glass substrates
In light of the potential application of quartz glass as a mould material for precision glass moulding (PGM), this study aims to evaluate the feasibility of employing CrWN–Ru coatings for protective purposes. Particular attention is given to the effect of Cr, Ti and Si interlayers on enhancing the service performance of the CrWN–Ru coating system. CrWN–Ru, Cr/CrWN–Ru, Ti/CrWN–Ru, and Si/CrWN–Ru coatings were deposited on quartz glass substrates using plasma-enhanced magnetron sputtering. A comparative experimental approach was adopted to investigate the mechanical and tribological properties of the four coating systems. The results demonstrate that plasma-enhanced magnetron sputtering enables the fabrication of CrWN–Ru coatings with satisfactory surface quality and structural stability on quartz glass substrates. The introduction of Cr, Ti, and Si interlayers was found to reduce the surface quality of the coatings without altering their preferred crystallographic orientation, while the phase structure remained stable. At the same time, the presence of interlayers enhanced the hardness and Young's modulus of the CrWN–Ru coatings, thereby improving their overall strength–toughness balance. Among the systems examined, the coating with a Cr interlayer exhibited the best performance, achieving the highest hardness (9.35 GPa) and Young's modulus (144.55 GPa), together with superior toughness and film–substrate adhesion. In contrast, the CrWN–Ru coating without an interlayer demonstrated excellent tribological behaviour, with the coefficient of friction and wear rate reaching as low as 0.326 and 1.14 × 10−7 mm3/N·m, respectively. However, the introduction of interlayers was observed to diminish the wear resistance of the CrWN–Ru coatings, and this adverse effect became more pronounced with increasing interlayer thickness. All four CrWN–Ru coatings were found to exhibit a similar wear damage mechanism, which proceeds through the sequence: friction - oxidation - adhesion - abrasive wear - crack formation - delamination. This study provides theoretical guidance for the design, optimisation, and performance tailoring of CrWN–Ru coatings on quartz glass substrates, thereby promoting the application of quartz glass in the field of precision glass moulding.
期刊介绍:
Materials Chemistry and Physics is devoted to short communications, full-length research papers and feature articles on interrelationships among structure, properties, processing and performance of materials. The Editors welcome manuscripts on thin films, surface and interface science, materials degradation and reliability, metallurgy, semiconductors and optoelectronic materials, fine ceramics, magnetics, superconductors, specialty polymers, nano-materials and composite materials.