阀盖抛光中刀具影响函数引起的中频误差特性

Applied optics Pub Date : 2025-09-20 DOI:10.1364/AO.566380
Lirong Peng, Yiren Wang, Longxiang Li, Fenghua Shi, Zhongyang Lu, Donglin Xue, Xiaoqin Zhou, Xuejun Zhang
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引用次数: 0

摘要

阀盖抛光是一种经济、高精度、适应性强的抛光技术,广泛应用于复杂曲面的精密加工。然而,中空频误差残差严重制约了该算法在形状误差修正和最终加工精度方面的收敛效率。研究了阀盖抛光过程中刀具去除函数特性对MSF误差的影响。首先,采用基于Preston定律、赫兹接触力学和运动学分析的计算框架,通过有限元模拟推导出不同工具和工艺条件下的理论去除函数。随后,建立了基于特征去除函数的光谱域仿真模型,以量化光加工表面的MSF误差残差。仿真结果表明,在较大曲率阀盖和较低气压条件下,MSF误差残差较小。最后,在直径为100 mm的高精度平板熔融硅石上进行了实验,验证了MSF预测模型,实验结果与仿真结果具有较好的一致性。本研究结果为抑制高精度阀盖抛光应用中的MSF误差提供了关键指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mid-spatial frequency error characteristics induced by tool influence function in bonnet polishing.

Bonnet polishing, a cost-effective and high-precision polishing technique with remarkable adaptability, is widely utilized in the precision machining of complex curved surfaces. However, mid-spatial frequency (MSF) error residuals significantly constrain its convergence efficiency in form error correction and ultimate machining accuracy. This paper investigates the influence of tool removal function characteristics on MSF errors during bonnet polishing. Initially, the theoretical removal functions under varying tool and process conditions were derived through finite element simulations, with the computational framework grounded in Preston's law, Hertzian contact mechanics, and kinematic analysis. Subsequently, a spectral-domain simulation model was developed to quantify MSF error residuals on optically finished surfaces based on the characterized removal functions. The simulation results indicate that under conditions of larger curvature bonnets and lower air pressure, the MSF error residuals are smaller. Finally, experiments were conducted on a high-precision flat fused silica element with a diameter of 100 mm to validate the MSF prediction model, and the experimental results showed good consistency with the simulation results. The findings of this study provide critical guidance for suppressing MSF errors in high-precision bonnet polishing applications.

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