双波段高吸收超表面氧化钒非冷却探测器。

Applied optics Pub Date : 2025-09-20 DOI:10.1364/AO.572332
Jun Yang, Jun Zhao, Chun-Li Yang, Li-Hua Li, Xiao-Xia Gong, Hui Fang, Ze-Hui Zhu
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引用次数: 0

摘要

氧化钒(VOx)非冷却探测器因其体积小、成本低、不需要冷却和性能可靠而获得越来越多的市场份额。然而,随着这些探测器像素尺寸的减小,吸光度降低的问题变得更加突出。为了解决这一问题,本研究提出了一种“MIM+保护伞”超表面VOx非冷却探测器。通过仿真优化,我们在长波红外范围内实现了97%以上的平均吸收率,并且在中红外波段也表现出优异的吸收特性。此外,我们通过制作和测试验证并比较了该双层超表面对VOx非冷却探测器吸光度的贡献,证明了该结构的可行性和优越性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dual-band high-absorption metasurface vanadium oxide uncooled detector.

Vanadium oxide (VOx) uncooled detectors are gaining increasing market share due to their small size, low cost, no cooling requirement, and reliable performance. However, as the pixel sizes of these detectors decrease, the problem of reduced absorptances becomes more prominent. To address this issue, this study proposes a "MIM+umbrella" metasurface VOx uncooled detector. Through simulation optimization, we achieved an average absorptance of over 97% in the long-wave infrared range and also demonstrated excellent absorption characteristics in the mid-infrared band. Furthermore, we validated and compared the contributions of this dual-layer metasurface to the absorptance of VOx uncooled detectors through fabrication and testing, demonstrating the feasibility and superiority of this structure.

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