利用角立方反射镜光学对称性的多自由度测量系统串扰误差补偿。

Applied optics Pub Date : 2025-09-01 DOI:10.1364/AO.567020
Chuang Sun, Changzhi Cui, Xin Zheng, Tianlin Zhou
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引用次数: 0

摘要

在多自由度测量系统中,由旋转运动和平移运动耦合引起的串扰误差严重降低了系统精度。本研究提出了一种基于角立方后反射器光学对称性的串扰补偿模型,旨在解耦横摇、俯仰、偏航和水平/垂直位移之间的相互作用。建立了一个数学框架,集成了坐标变换、矢量分析和光程方程。该模型通过求解多自由度运动条件下的入射平面方程,可以精确预测探测器的光斑位移。实验结果表明,补偿后的水平位移误差减小了84.2%(从17.1µm减小到2.7µm),垂直位移误差减小了94.3%(从73.5µm减小到4.2µm)。该模型显著降低了多自由度测量系统中串扰引起的误差,从而提高了系统的整体性能和可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Crosstalk error compensation in multi-degree-of-freedom measurement systems utilizing the optical symmetry of a corner cube retroreflector.

Crosstalk errors induced by the coupling between rotational and translational motions in multi-degree-of-freedom measurement systems critically degrade system accuracy. This study proposes a crosstalk compensation model based on the optical symmetry of the corner cube retroreflector, aiming to decouple the interaction between the roll, pitch, yaw, and horizontal/vertical displacements. A mathematical framework was developed, integrating the coordinate transformation, vector analysis, and optical path equations. This model can precisely forecast the spot displacement of the detector by solving the incident plane equation under the condition of multi-degree-of-freedom motion. Experimental results demonstrate an 84.2% reduction in horizontal displacement error (from 17.1 to 2.7 µm) and a 94.3% reduction in vertical displacement error (from 73.5 to 4.2 µm) after compensation. The proposed model significantly reduces inaccuracies caused by crosstalk in multi-degree-of-freedom measurement systems, thereby enhancing the overall performance and reliability of the system.

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