基于飞秒激光刻微级联fpi产生游标效应的高灵敏度光纤气体压力传感器。

Applied optics Pub Date : 2025-09-10 DOI:10.1364/AO.572004
Yao Bai, Shan Gao, Jing Yang, Yan Liu, Yijian Chen, Can Yang, Guopei Mao, Zheng Zhu, Jinhui Shi, Libo Yuan, Chunying Guan
{"title":"基于飞秒激光刻微级联fpi产生游标效应的高灵敏度光纤气体压力传感器。","authors":"Yao Bai, Shan Gao, Jing Yang, Yan Liu, Yijian Chen, Can Yang, Guopei Mao, Zheng Zhu, Jinhui Shi, Libo Yuan, Chunying Guan","doi":"10.1364/AO.572004","DOIUrl":null,"url":null,"abstract":"<p><p>We demonstrate a Vernier effect-enhanced all-fiber gas pressure sensor with an extremely simple structure. The sensor consists of a rectangular air cavity near the end face of a single-mode fiber (SMF) fabricated by femtosecond laser micromachining. The two walls of the air cavity and the end face of the SMF form micro cascaded Fabry-Perot interferometers to generate the Vernier effect. The sensor exhibits a gas pressure sensitivity of 79.69 nm/MPa within a range of 0.1-2.5 MPa, an ultralow temperature cross-sensitivity of 0.0002 MPa/°C, and excellent stability. Owing to its straightforward fabrication and outstanding performance, the sensor holds significant potential for mass production and application in confined spaces for high-precision gas pressure monitoring.</p>","PeriodicalId":101299,"journal":{"name":"Applied optics","volume":"64 26","pages":"7668-7676"},"PeriodicalIF":0.0000,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-sensitivity fiber gas pressure sensor based on the Vernier effect generated by femtosecond laser-inscribed micro-cascaded FPIs.\",\"authors\":\"Yao Bai, Shan Gao, Jing Yang, Yan Liu, Yijian Chen, Can Yang, Guopei Mao, Zheng Zhu, Jinhui Shi, Libo Yuan, Chunying Guan\",\"doi\":\"10.1364/AO.572004\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>We demonstrate a Vernier effect-enhanced all-fiber gas pressure sensor with an extremely simple structure. The sensor consists of a rectangular air cavity near the end face of a single-mode fiber (SMF) fabricated by femtosecond laser micromachining. The two walls of the air cavity and the end face of the SMF form micro cascaded Fabry-Perot interferometers to generate the Vernier effect. The sensor exhibits a gas pressure sensitivity of 79.69 nm/MPa within a range of 0.1-2.5 MPa, an ultralow temperature cross-sensitivity of 0.0002 MPa/°C, and excellent stability. Owing to its straightforward fabrication and outstanding performance, the sensor holds significant potential for mass production and application in confined spaces for high-precision gas pressure monitoring.</p>\",\"PeriodicalId\":101299,\"journal\":{\"name\":\"Applied optics\",\"volume\":\"64 26\",\"pages\":\"7668-7676\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2025-09-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/AO.572004\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/AO.572004","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

我们展示了一种结构极其简单的微调效应增强的全光纤气体压力传感器。该传感器由飞秒激光微加工制备的单模光纤端面附近的矩形空腔组成。气腔的两壁和SMF的端面形成微级联法布里-珀罗干涉仪,产生游标效应。该传感器在0.1 ~ 2.5 MPa范围内的气体压力灵敏度为79.69 nm/MPa,超低温交叉灵敏度为0.0002 MPa/℃,稳定性好。由于其简单的制造和出色的性能,该传感器具有大规模生产和应用于密闭空间的高精度气体压力监测的巨大潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High-sensitivity fiber gas pressure sensor based on the Vernier effect generated by femtosecond laser-inscribed micro-cascaded FPIs.

We demonstrate a Vernier effect-enhanced all-fiber gas pressure sensor with an extremely simple structure. The sensor consists of a rectangular air cavity near the end face of a single-mode fiber (SMF) fabricated by femtosecond laser micromachining. The two walls of the air cavity and the end face of the SMF form micro cascaded Fabry-Perot interferometers to generate the Vernier effect. The sensor exhibits a gas pressure sensitivity of 79.69 nm/MPa within a range of 0.1-2.5 MPa, an ultralow temperature cross-sensitivity of 0.0002 MPa/°C, and excellent stability. Owing to its straightforward fabrication and outstanding performance, the sensor holds significant potential for mass production and application in confined spaces for high-precision gas pressure monitoring.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信