Grating interferometer: The dominant positioning strategy in atomic and close-to-atomic scale manufacturing

The rapid evolution of manufacturing technologies has entered its third phase, with a focus on atomic and close-to-atomic scale manufacturing (ACSM), a pivotal advancement driving progress in precision fabrication. One of the cores of ACSM is ultra-precise positioning technologies, which are critical for achieving the required precision and efficiency in nanoscale manufacturing. Grating interferometer has emerged as the leading strategy due to its accuracy, scalability, and stability. Recent advancements in this technology have further solidified its role as a dominant solution in ultra-precision metrology. This review provides an overview of grating interferometer as a positioning tool for ACSM, starting with its application domains and advantages, followed by a detailed explanation of its fundamental principles. We then present a comprehensive comparison of different representative grating interferometers. Additionally, we perform quantitative multi-source measurement error analysis, discuss methods for compensating errors, and explore various phase measurement techniques. Finally, we conclude with a forward-looking perspective on the future development of grating interferometer, highlighting emerging trends and potential breakthroughs.