Lavanya Repaka, J. Ajayan, Asisa Kumar Panigrahy, Sandip Bhattacharya, B. Mounika
{"title":"SiC晶圆上的高性能AlN/GaN/AlGaN-MOSHEMTs:未来雷达和通信系统的缩放和栅极材料创新","authors":"Lavanya Repaka, J. Ajayan, Asisa Kumar Panigrahy, Sandip Bhattacharya, B. Mounika","doi":"10.1007/s40042-025-01415-5","DOIUrl":null,"url":null,"abstract":"<div><p>The DC/RF performance of a T-gate AlN/GaN heterojunction MOS-HEMT (AGMH) device on SiC substrate with a Hafnium-based high-k gate dielectric material is thoroughly and meticulously investigated in this article. The research investigation looks at how different gate lengths affect important device metrics, such as cut-off frequency (<i>f</i><sub><i>T</i></sub>), intrinsic capacitances (C<sub>GD</sub> & C<sub>GS</sub>), G<sub>M</sub> (transconductance), and I<sub>D</sub> (drain current). The proposed AGMH device with L<sub>G</sub> of 40 nm, t<sub>b</sub> of 3 nm, t<sub>ox</sub> of 3 nm, L<sub>GS</sub> of 250 nm, & L<sub>GD</sub> of 400 nm exhibited I<sub>D-max</sub> (maximum I<sub>D</sub>) of 2.221 A/mm, G<sub>M-peak</sub> (peak transconductance) of 505.5 mS/mm, & <i>f</i><sub><i>T-max</i></sub> (maximum <i>f</i><sub><i>T</i></sub>) of 256 GHz. The remarkable DC/RF performance results from strong carrier confinement & minimized leakage current (I<sub>DL</sub>) enabled by scaling down the device parameters. This makes them a desirable option for RF power electronics and microwave (µw) applications in future generations, with a great deal of room for performance and efficiency gains.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 4","pages":"414 - 429"},"PeriodicalIF":0.9000,"publicationDate":"2025-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-performance AlN/GaN/AlGaN-MOSHEMTs on SiC wafer: scaling and gate material innovations for upcoming radar and communication systems\",\"authors\":\"Lavanya Repaka, J. Ajayan, Asisa Kumar Panigrahy, Sandip Bhattacharya, B. Mounika\",\"doi\":\"10.1007/s40042-025-01415-5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The DC/RF performance of a T-gate AlN/GaN heterojunction MOS-HEMT (AGMH) device on SiC substrate with a Hafnium-based high-k gate dielectric material is thoroughly and meticulously investigated in this article. The research investigation looks at how different gate lengths affect important device metrics, such as cut-off frequency (<i>f</i><sub><i>T</i></sub>), intrinsic capacitances (C<sub>GD</sub> & C<sub>GS</sub>), G<sub>M</sub> (transconductance), and I<sub>D</sub> (drain current). The proposed AGMH device with L<sub>G</sub> of 40 nm, t<sub>b</sub> of 3 nm, t<sub>ox</sub> of 3 nm, L<sub>GS</sub> of 250 nm, & L<sub>GD</sub> of 400 nm exhibited I<sub>D-max</sub> (maximum I<sub>D</sub>) of 2.221 A/mm, G<sub>M-peak</sub> (peak transconductance) of 505.5 mS/mm, & <i>f</i><sub><i>T-max</i></sub> (maximum <i>f</i><sub><i>T</i></sub>) of 256 GHz. The remarkable DC/RF performance results from strong carrier confinement & minimized leakage current (I<sub>DL</sub>) enabled by scaling down the device parameters. This makes them a desirable option for RF power electronics and microwave (µw) applications in future generations, with a great deal of room for performance and efficiency gains.</p></div>\",\"PeriodicalId\":677,\"journal\":{\"name\":\"Journal of the Korean Physical Society\",\"volume\":\"87 4\",\"pages\":\"414 - 429\"},\"PeriodicalIF\":0.9000,\"publicationDate\":\"2025-06-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Korean Physical Society\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s40042-025-01415-5\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Physical Society","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s40042-025-01415-5","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
High-performance AlN/GaN/AlGaN-MOSHEMTs on SiC wafer: scaling and gate material innovations for upcoming radar and communication systems
The DC/RF performance of a T-gate AlN/GaN heterojunction MOS-HEMT (AGMH) device on SiC substrate with a Hafnium-based high-k gate dielectric material is thoroughly and meticulously investigated in this article. The research investigation looks at how different gate lengths affect important device metrics, such as cut-off frequency (fT), intrinsic capacitances (CGD & CGS), GM (transconductance), and ID (drain current). The proposed AGMH device with LG of 40 nm, tb of 3 nm, tox of 3 nm, LGS of 250 nm, & LGD of 400 nm exhibited ID-max (maximum ID) of 2.221 A/mm, GM-peak (peak transconductance) of 505.5 mS/mm, & fT-max (maximum fT) of 256 GHz. The remarkable DC/RF performance results from strong carrier confinement & minimized leakage current (IDL) enabled by scaling down the device parameters. This makes them a desirable option for RF power electronics and microwave (µw) applications in future generations, with a great deal of room for performance and efficiency gains.
期刊介绍:
The Journal of the Korean Physical Society (JKPS) covers all fields of physics spanning from statistical physics and condensed matter physics to particle physics. The manuscript to be published in JKPS is required to hold the originality, significance, and recent completeness. The journal is composed of Full paper, Letters, and Brief sections. In addition, featured articles with outstanding results are selected by the Editorial board and introduced in the online version. For emphasis on aspect of international journal, several world-distinguished researchers join the Editorial board. High quality of papers may be express-published when it is recommended or requested.