3d打印微电子薄膜的开裂和分层机理

IF 8.3 1区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Chunshan Hu , Sanjida Jahan , Rahul Panat
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引用次数: 0

摘要

微米级厚度薄膜的完整性对微电子工业具有重要意义。通过化学和/或物理气相沉积等常规方法制成的这种薄膜的开裂机制和力学是很容易理解的。最近出现的印刷电子技术允许通过纳米颗粒印刷和烧结按需制造各种功能材料的薄膜。然而,在这种情况下,失效机制受到制造技术和所用材料的强烈影响,但这种依赖关系尚未得到很好的理解。在这项研究中,我们研究了气溶胶喷射(AJ) 3D纳米打印金薄膜在陶瓷衬底上的开裂和分层机理。层接层的薄膜制造可以确定每个工艺步骤(印刷、干燥和烧结)对薄膜应力和失效的影响。我们表明,薄膜开裂只发生在薄膜干燥阶段(即印刷后立即),并且相对独立于底层承印物。我们还表明,影响开裂的最重要因素是印刷薄膜中粘合剂的玻璃化转变温度(Tg)(在烧结过程中被去除,但在印刷和干燥过程中存在);干燥引起的毛细应力引起经典的“泥裂”。换句话说,如果在接近粘合剂Tg的情况下进行印刷,则系统会变得异常耐应变,从而可以避免开裂。正如预期的那样,发现分层是薄膜-衬底界面相互作用的函数。最后,我们开发了印刷电子薄膜的失效机制图,并确定了可以制造可靠薄膜的厚度。这项工作为通过3D打印可靠地制造电子薄膜奠定了工程策略基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Mechanics of cracking and delamination in 3D-printed microelectronic films

Mechanics of cracking and delamination in 3D-printed microelectronic films
Integrity of thin films with micron-sized thickness is of high importance to the microelectronics industry. The mechanisms and mechanics of the cracking of such films made by conventional methods such as chemical and/or physical vapor deposition are well understood. Printed electronic techniques have recently emerged that allow films of various functional materials to be fabricated on-demand via nanoparticle printing followed by sintering. The failure mechanisms in such cases, however, are strongly influenced by the fabrication technique and the material used, but this dependence is not well understood. In this research, we study the mechanisms of cracking and delamination of Aerosol Jet (AJ) 3D nano-printed gold films on ceramic substrates. The layer-by-layer film fabrication allows the determination of effect of each process step (printing, drying, and sintering) on film stress and failure. We show that film cracking occurs only during the film drying phase (i.e., immediately following printing), and is relatively independent of the underlying substrate. We also show that the most significant factor affecting cracking is the glass transition temperature (Tg) of the binder in the printed film (which is removed during sintering but is present during printing and drying); with drying-induced capillary stress giving rise to the classic ‘mud-cracking’. In other words, if printing is done close to the Tg of the binder, the system becomes unusually strain tolerant and cracking can be avoided. As expected, the delamination is found to be a function of the film-substrate interface interaction. Finally, we develop failure mechanism maps for printed electronic films and determine the thickness below which reliable films can be fabricated. This work lays the foundation of engineering strategies for the reliable fabrication of electronic films via 3D printing.
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来源期刊
Acta Materialia
Acta Materialia 工程技术-材料科学:综合
CiteScore
16.10
自引率
8.50%
发文量
801
审稿时长
53 days
期刊介绍: Acta Materialia serves as a platform for publishing full-length, original papers and commissioned overviews that contribute to a profound understanding of the correlation between the processing, structure, and properties of inorganic materials. The journal seeks papers with high impact potential or those that significantly propel the field forward. The scope includes the atomic and molecular arrangements, chemical and electronic structures, and microstructure of materials, focusing on their mechanical or functional behavior across all length scales, including nanostructures.
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