微干蚀刻全氟聚合物光纤的径向应力分布

IF 1 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEJ Transactions on Electrical and Electronic Engineering Pub Date : 2025-01-21 DOI:10.1002/tee.24257

Takuto Nakanishi, Ryo Nakashima, Keito Ishida, Yuji Wada, Cheng-Yao Lo, Kentaro Nakamura, Heeyoung Lee, Yosuke Mizuno, Daisuke Yamane

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Radial Stress Distribution in Micro Dry-Etched Perfluorinated Polymer Optical Fibers

This paper presents the first investigation into how the dry etching depth of the reinforcement layer in perfluorinated polymer optical fibers (PF-POFs) influences radial stress distribution. Using finite element method simulations, we model the PF-POF structure based on the actual dry-etched profiles achieved through reactive ion etching (RIE). The results demonstrate that increasing the etching depth leads to higher radial stress in both the core and cladding layers when strain is applied longitudinally. These findings suggest that RIE processes present a feasible method for tuning the sensitivity of PF-POF-based strain sensors. © 2025 Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.

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来源期刊

IEEJ Transactions on Electrical and Electronic Engineering 工程技术-工程：电子与电气

CiteScore

2.70

自引率

10.00%

发文量

199

审稿时长

4.3 months

期刊介绍： IEEJ Transactions on Electrical and Electronic Engineering (hereinafter called TEEE ) publishes 6 times per year as an official journal of the Institute of Electrical Engineers of Japan (hereinafter "IEEJ"). This peer-reviewed journal contains original research papers and review articles on the most important and latest technological advances in core areas of Electrical and Electronic Engineering and in related disciplines. The journal also publishes short communications reporting on the results of the latest research activities TEEE ) aims to provide a new forum for IEEJ members in Japan as well as fellow researchers in Electrical and Electronic Engineering from around the world to exchange ideas and research findings.