基于电磁力和静电力补偿原理的软悬臂刚度标定

Q4 Engineering

Measurement Sensors Pub Date : 2025-05-01 DOI:10.1016/j.measen.2024.101335

Valeriya Cherkasova , Zhi Li , Radovan Popadic , Thomas Froehlich , Uwe Brand

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引用次数: 0

摘要

本文介绍了伊尔梅瑙工业大学开发的可追溯力-位移测量装置的改进版本。力的校准是通过一个天平与电磁力补偿原理进行的。作为本研究的一部分，该装置用于校准软悬臂梁的刚度。测量刚度在13mn /m ~ 100mn /m范围内的扩展相对不确定度为1.5% ~ 2.7%。通过与PTB的双向测量比较，验证了该装置的正确性，得到了较好的一致性。

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Calibration of the stiffness of soft cantilevers based on electromagnetic and electrostatic force compensation principles

This article presents a modified version of a traceable force-displacement measurement device developed at TU Ilmenau. The calibration of forces is carried out by a balance with the electromagnetic and electrostatic principles of force compensation. As part of this study, the device was used to calibrate the stiffness of soft cantilevers. The expanded relative uncertainty of the measured stiffnesses in the range from 13 mN/m to 100 mN/m ranged from 1.5 % to 2.7 %. The device was also verified through two-way comparison of measurements with the PTB, good agreement was obtained.

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