A 2-D Microdisplay Using An Integrated Microresonating Waveguide Scanning System.

Our research team has developed a MEMS based on a 2D micro image display device that can potentially overcome the size reduction limits while maintaining the high image resolution and field of view obtained by mirror based display systems. The basic design of the optical scanner includes a micro-fabricated polymer based cantilever waveguide that is electromechanically deflected by a 2D piezoelectric actuator. From the distal tip of the cantilever waveguide, a light beam is emitted and the direction of propagation is displaced along two orthogonal directions. The waveforms for the X-Y actuators and the LED light modulation are controlled using a field programmable gate array (FPGA). In this paper we will extend our display development by reporting more recent integration of components including actuators and light sources with a controller. Here we will describe the design, fabrication of the latest polymeric waveguide cantilever beam steering device driven by 2-D piezoelectric actuator using aerosol deposited PZT thick film actuators. The mechanical and optical design for the microresonating scanner will be discussed. In addition, the mechanical and optical performance of the 2-D scanner will be presented.