Bharathwaj Murugesan, Periyannan Palaniyandi, Karuppasamy Pichan and Ramasamy Perumalsamy
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The transformation of impurities and their byproducts on the silicon surface were analyzed using field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDX), X-ray photoelectron spectroscopy (XPS), and inductively coupled plasma mass spectroscopy (ICP-MS). All investigations were conducted before and after treatment with each etchant, including Ag-ACE. Our results demonstrate remarkable removal efficiencies for aluminum (Al), iron (Fe), and nickel (Ni). This breakthrough highlights the potential of Ag-ACE using H<small><sub>3</sub></small>PO<small><sub>4</sub></small> for efficient metal impurity removal and high yield rates. The leaching results indicate that different concentrations of the oxidizing agent H<small><sub>3</sub></small>PO<small><sub>4</sub></small>@0.5 M < 1.0 M < 1.5 M effectively remove impurity contaminants. The major impurities in silicon, such as Fe, Al, and Ni, were significantly reduced by the Ag-ACE process, increasing the purity of MG-Si from 99.55% to 99.99%. 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引用次数: 0
摘要
将冶金级硅(MG-Si)提纯为太阳级硅(SoG-Si)对于实现最佳性能和纯度至关重要。传统的硅精炼工艺成本高,能源密集,而且对环境有害。在本研究中,我们介绍了一种银辅助化学蚀刻(Ag-ACE)工艺,以磷酸(H3PO4)作为氧化剂,取代传统的过氧化氢(H2O2),用于纯化硅裂损(SKL)。这种方法有效地将大块材料减少为细颗粒,增加表面积,更容易去除金属和非金属杂质。采用场发射扫描电镜(FESEM)、能量色散x射线能谱(EDX)、x射线光电子能谱(XPS)和电感耦合等离子体质谱(ICP-MS)分析了杂质及其副产物在硅表面的转变。在每种蚀刻剂(包括Ag-ACE)治疗前后进行所有调查。我们的研究结果显示了对铝(Al)、铁(Fe)和镍(Ni)的显著去除效率。这一突破突出了Ag-ACE利用H3PO4高效去除金属杂质和高收率的潜力。浸出结果表明:不同浓度的氧化剂H3PO4@0.5 M <;1.0 M <;1.5 M有效去除杂质污染物。Ag-ACE工艺显著降低了硅中的Fe、Al和Ni等主要杂质,使MG-Si的纯度从99.55%提高到99.99%。根据Ag-ACE处理后硅粉的回收率计算硅的产率。
Investigation of phosphoric acid-catalyzed silver-assisted chemical etching for upgrading metallurgical grade silicon to solar grade silicon
Purifying metallurgical-grade silicon (MG-Si) to solar-grade silicon (SoG-Si) is crucial for achieving optimal performance and purity. Traditional silicon refinement processes are costly, energy-intensive, and environmentally harmful. In this study, we introduce a silver-assisted chemical etching (Ag-ACE) process for purifying silicon kerf loss (SKL), using phosphoric acid (H3PO4) as an oxidizing agent to replace the conventional hydrogen peroxide (H2O2). This approach effectively reduces bulk material into fine particles, increasing the surface area for easier removal of metal and non-metal impurities. The transformation of impurities and their byproducts on the silicon surface were analyzed using field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDX), X-ray photoelectron spectroscopy (XPS), and inductively coupled plasma mass spectroscopy (ICP-MS). All investigations were conducted before and after treatment with each etchant, including Ag-ACE. Our results demonstrate remarkable removal efficiencies for aluminum (Al), iron (Fe), and nickel (Ni). This breakthrough highlights the potential of Ag-ACE using H3PO4 for efficient metal impurity removal and high yield rates. The leaching results indicate that different concentrations of the oxidizing agent H3PO4@0.5 M < 1.0 M < 1.5 M effectively remove impurity contaminants. The major impurities in silicon, such as Fe, Al, and Ni, were significantly reduced by the Ag-ACE process, increasing the purity of MG-Si from 99.55% to 99.99%. The yield of silicon was calculated based on the recovery of silicon powder after Ag-ACE treatment.