高分辨率的铜微图案化柔性基板通过激光辅助表面活化

IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL
Zhaoyan Li , Yuhang Luo , Xiaozhu Xie , Jiageng Yang , Huanhuan Zhuang , Yajun Huang
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引用次数: 0

摘要

高性能导电金属电路在现代电子工业中是必不可少的。在简单性、成本效益和可扩展性方面,增材制造技术比传统的光刻(减法方法)具有显著的优势。虽然已经探索了各种印刷技术,但大多数都受到几十微米的最小特征尺寸的限制,并且需要高温后处理以增强功能材料的性能。本文提出了一种简单、高效、通用的增材制造策略,通过激光辅助选择性金属沉积来创建高分辨率的铜图案。该技术采用超快紫外激光选择性照射将形成铜图案的区域,诱导光化学修饰。然后将辐照区域播种并施加ECP,导致金属层沉积在催化种子晶体上。所获得的铜涂层具有优异的导电性(1.77 μΩ·cm)和附着力(5B, ASTM),可与大块铜媲美。这种方法可以在各种未经处理的刚性和柔性基板上制造窄至4 μm的铜图案的高精度微型电路,以适应各种复杂的设计要求。该方法被证明用于柔性电子产品中的金属互连图案,包括触摸屏和加热器,推进下一代印刷电子产品。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High-resolution copper micropatterning on flexible substrates via laser-assisted surface activation
High-performance conductive metal circuits are essential in the modern electronics industry. Additive manufacturing techniques offer significant advantages over traditional photolithography (subtractive methods) in terms of simplicity, cost-effectiveness, and scalability. While various printing techniques have been explored, most are limited by minimum feature sizes in the tens of microns and require high-temperature post-processing to enhance the performance of functional materials. Here, a facile, efficient, and versatile additive manufacturing strategy is proposed for creating high-resolution copper patterns via laser-assisted selective metal deposition. This technique employs an ultrafast UV laser to selectively irradiate areas where copper patterns will be formed, inducing photochemical modifications. The irradiated regions are then seeded and subjected to ECP, resulting in a metal layer deposited on catalytic seed crystals. The copper coating achieved exhibits excellent conductivity (1.77 μΩ·cm) and adhesion (5B, ASTM), comparable to bulk copper. This approach enables the fabrication of high-precision miniature circuits with copper patterns as narrow as 4 μm on various untreated rigid and flexible substrates, accommodating diverse and complex design requirements. The approach is demonstrated for patterning metal interconnects in flexible electronics, including touch screens and thermal heaters, advancing the next generation of printed electronics.
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来源期刊
Journal of Materials Processing Technology
Journal of Materials Processing Technology 工程技术-材料科学:综合
CiteScore
12.60
自引率
4.80%
发文量
403
审稿时长
29 days
期刊介绍: The Journal of Materials Processing Technology covers the processing techniques used in manufacturing components from metals and other materials. The journal aims to publish full research papers of original, significant and rigorous work and so to contribute to increased production efficiency and improved component performance. Areas of interest to the journal include: • Casting, forming and machining • Additive processing and joining technologies • The evolution of material properties under the specific conditions met in manufacturing processes • Surface engineering when it relates specifically to a manufacturing process • Design and behavior of equipment and tools.
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