Zhaoyan Li , Yuhang Luo , Xiaozhu Xie , Jiageng Yang , Huanhuan Zhuang , Yajun Huang
{"title":"高分辨率的铜微图案化柔性基板通过激光辅助表面活化","authors":"Zhaoyan Li , Yuhang Luo , Xiaozhu Xie , Jiageng Yang , Huanhuan Zhuang , Yajun Huang","doi":"10.1016/j.jmatprotec.2025.118901","DOIUrl":null,"url":null,"abstract":"<div><div>High-performance conductive metal circuits are essential in the modern electronics industry. Additive manufacturing techniques offer significant advantages over traditional photolithography (subtractive methods) in terms of simplicity, cost-effectiveness, and scalability. While various printing techniques have been explored, most are limited by minimum feature sizes in the tens of microns and require high-temperature post-processing to enhance the performance of functional materials. Here, a facile, efficient, and versatile additive manufacturing strategy is proposed for creating high-resolution copper patterns via laser-assisted selective metal deposition. This technique employs an ultrafast UV laser to selectively irradiate areas where copper patterns will be formed, inducing photochemical modifications. The irradiated regions are then seeded and subjected to ECP, resulting in a metal layer deposited on catalytic seed crystals. The copper coating achieved exhibits excellent conductivity (1.77 μΩ·cm) and adhesion (5B, ASTM), comparable to bulk copper. This approach enables the fabrication of high-precision miniature circuits with copper patterns as narrow as 4 μm on various untreated rigid and flexible substrates, accommodating diverse and complex design requirements. The approach is demonstrated for patterning metal interconnects in flexible electronics, including touch screens and thermal heaters, advancing the next generation of printed electronics.</div></div>","PeriodicalId":367,"journal":{"name":"Journal of Materials Processing Technology","volume":"341 ","pages":"Article 118901"},"PeriodicalIF":6.7000,"publicationDate":"2025-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-resolution copper micropatterning on flexible substrates via laser-assisted surface activation\",\"authors\":\"Zhaoyan Li , Yuhang Luo , Xiaozhu Xie , Jiageng Yang , Huanhuan Zhuang , Yajun Huang\",\"doi\":\"10.1016/j.jmatprotec.2025.118901\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>High-performance conductive metal circuits are essential in the modern electronics industry. Additive manufacturing techniques offer significant advantages over traditional photolithography (subtractive methods) in terms of simplicity, cost-effectiveness, and scalability. While various printing techniques have been explored, most are limited by minimum feature sizes in the tens of microns and require high-temperature post-processing to enhance the performance of functional materials. Here, a facile, efficient, and versatile additive manufacturing strategy is proposed for creating high-resolution copper patterns via laser-assisted selective metal deposition. This technique employs an ultrafast UV laser to selectively irradiate areas where copper patterns will be formed, inducing photochemical modifications. The irradiated regions are then seeded and subjected to ECP, resulting in a metal layer deposited on catalytic seed crystals. The copper coating achieved exhibits excellent conductivity (1.77 μΩ·cm) and adhesion (5B, ASTM), comparable to bulk copper. This approach enables the fabrication of high-precision miniature circuits with copper patterns as narrow as 4 μm on various untreated rigid and flexible substrates, accommodating diverse and complex design requirements. The approach is demonstrated for patterning metal interconnects in flexible electronics, including touch screens and thermal heaters, advancing the next generation of printed electronics.</div></div>\",\"PeriodicalId\":367,\"journal\":{\"name\":\"Journal of Materials Processing Technology\",\"volume\":\"341 \",\"pages\":\"Article 118901\"},\"PeriodicalIF\":6.7000,\"publicationDate\":\"2025-05-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Materials Processing Technology\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0924013625001918\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, INDUSTRIAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Materials Processing Technology","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924013625001918","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, INDUSTRIAL","Score":null,"Total":0}
High-resolution copper micropatterning on flexible substrates via laser-assisted surface activation
High-performance conductive metal circuits are essential in the modern electronics industry. Additive manufacturing techniques offer significant advantages over traditional photolithography (subtractive methods) in terms of simplicity, cost-effectiveness, and scalability. While various printing techniques have been explored, most are limited by minimum feature sizes in the tens of microns and require high-temperature post-processing to enhance the performance of functional materials. Here, a facile, efficient, and versatile additive manufacturing strategy is proposed for creating high-resolution copper patterns via laser-assisted selective metal deposition. This technique employs an ultrafast UV laser to selectively irradiate areas where copper patterns will be formed, inducing photochemical modifications. The irradiated regions are then seeded and subjected to ECP, resulting in a metal layer deposited on catalytic seed crystals. The copper coating achieved exhibits excellent conductivity (1.77 μΩ·cm) and adhesion (5B, ASTM), comparable to bulk copper. This approach enables the fabrication of high-precision miniature circuits with copper patterns as narrow as 4 μm on various untreated rigid and flexible substrates, accommodating diverse and complex design requirements. The approach is demonstrated for patterning metal interconnects in flexible electronics, including touch screens and thermal heaters, advancing the next generation of printed electronics.
期刊介绍:
The Journal of Materials Processing Technology covers the processing techniques used in manufacturing components from metals and other materials. The journal aims to publish full research papers of original, significant and rigorous work and so to contribute to increased production efficiency and improved component performance.
Areas of interest to the journal include:
• Casting, forming and machining
• Additive processing and joining technologies
• The evolution of material properties under the specific conditions met in manufacturing processes
• Surface engineering when it relates specifically to a manufacturing process
• Design and behavior of equipment and tools.