空气中微银颗粒直接热压制备AlN陶瓷的金属化研究

IF 5.8 2区 材料科学 Q1 MATERIALS SCIENCE, CERAMICS
Zhicheng Ding , Chenghao Zhang , Yang Liu , Chun Li , Xiaoqing Si , Zongjing He , Zhiquan Wang , Jian Cao
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引用次数: 0

摘要

AlN金属化基板由于其高导热性和独特的电绝缘性能,在电子封装领域具有广阔的应用潜力。本工作报告了一种制备银涂层的方法,该方法是在空气中直接在AlN表面压制和烧结微银颗粒,而无需额外的钎焊填料或预处理。含Ag的Al2O3中间层(~ 200 nm)的原位形成对AlN/Ag界面的界面键合至关重要。Ag粒子在Al2O3中的扩散不仅增强了Ag层的界面附着力,而且提高了导热性。值得注意的是,AlN/Ag在950℃时的结合强度为67.6 MPa,导热系数为178.7 W·m−1·K−1。由于银层具有高密度和低晶界密度,在900℃时表现出优异的表面硬度和导电性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The metallization of AlN ceramics fabricated via direct hot-pressing micro-Ag particles in air
AlN metallization substrates hold broad application potential in the field of electronic packaging due to their high thermal conductivity and unique electrical insulation properties. The present work reports a method for preparing Ag coatings by directly pressing and sintering micro-Ag particles on the AlN surface in air without additional brazing fillers or pre-treatment. The in-situ formation of the Ag-containing Al2O3 interlayer (∼200 nm) is critical for the interfacial bonding at the AlN/Ag interface. The diffusion of Ag particles into Al2O3 not only enhances the interfacial adhesion of the Ag layer but also improves thermal conductivity. Notably, AlN/Ag exhibits a high bonding strength of 67.6 MPa with an excellent thermal conductivity of 178.7 W·m−1·K−1 at 950°C. The Ag layer demonstrates superior surface hardness and electrical conductivity at 900°C due to its high density and low grain boundary density.
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来源期刊
Journal of The European Ceramic Society
Journal of The European Ceramic Society 工程技术-材料科学:硅酸盐
CiteScore
10.70
自引率
12.30%
发文量
863
审稿时长
35 days
期刊介绍: The Journal of the European Ceramic Society publishes the results of original research and reviews relating to ceramic materials. Papers of either an experimental or theoretical character will be welcomed on a fully international basis. The emphasis is on novel generic science concerning the relationships between processing, microstructure and properties of polycrystalline ceramics consolidated at high temperature. Papers may relate to any of the conventional categories of ceramic: structural, functional, traditional or composite. The central objective is to sustain a high standard of research quality by means of appropriate reviewing procedures.
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