利用数据挖掘技术分析浮动区增长中难以捉摸的关系（Adv. Theory Simul. 5/2025）

IF 2.9 4区工程技术 Q1 MULTIDISCIPLINARY SCIENCES

Advanced Theory and Simulations Pub Date : 2025-05-12 DOI:10.1002/adts.202570009

Lucas Vieira, Robert Menzel, Martin Holena, Natasha Dropka

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引用次数: 0

摘要

高纯度硅单晶是使用浮动区（FZ）方法生长的，这是半导体工业的关键工艺，对可再生能源应用至关重要。在文章2400781中，Lucas Vieira， Natasha Dropka及其同事将数据挖掘技术应用于FZ模拟，揭示了生长参数和过程稳定性之间的复杂关系。研究结果为通过参数工程优化工艺提供了见解。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

An Analysis of Elusive Relationships in Floating Zone Growth Using Data Mining Techniques (Adv. Theory Simul. 5/2025)

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An Analysis of Elusive Relationships in Floating Zone Growth Using Data Mining Techniques (Adv. Theory Simul. 5/2025)

High-purity silicon single crystals are grown using the Floating Zone (FZ) method, a key process in the semiconductor industry and crucial for renewable energy applications. In article 2400781, Lucas Vieira, Natasha Dropka, and co-workers apply data mining techniques to FZ simulations, uncovering complex relationships between growth parameters and process stability. The findings offer insights for optimizing the process through parameter engineering.

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来源期刊

Advanced Theory and Simulations Multidisciplinary-Multidisciplinary

CiteScore

5.50

自引率

3.00%

发文量

221

期刊介绍： Advanced Theory and Simulations is an interdisciplinary, international, English-language journal that publishes high-quality scientific results focusing on the development and application of theoretical methods, modeling and simulation approaches in all natural science and medicine areas, including: materials, chemistry, condensed matter physics engineering, energy life science, biology, medicine atmospheric/environmental science, climate science planetary science, astronomy, cosmology method development, numerical methods, statistics