Rate Coefficients for Vibrationally Inelastic Transitions of the \(\mathbf{O}\boldsymbol{(}{}^{\textbf{3}}\boldsymbol{P}_{\boldsymbol{g}}\boldsymbol{)+}\mathbf{O}_{\mathbf{2}}\boldsymbol{(}^{\mathbf{3}}{{\Sigma}}^{\boldsymbol{-}}_{\boldsymbol{g}}\boldsymbol{,v}\boldsymbol{)}\) System on the O\({}_{\mathbf{3}}\) Ground Electronic State Potential Energy Surface at 100–1000 K

The \(v\rightarrow v^{\prime}\) rate coefficients for the vibrationally inelastic collisions of O atoms with O\({}_{2}\) molecules are presented for vibrational quantum numbers \(v\) from 0 to 8 and temperatures from 100 K to 1000 K. The rate coefficients were computed theoretically using an ab initio \(\mathrm{O}+\mathrm{O}_{2}\) interaction potential for the ground state of O\({}_{3}\). The rate constants obtained are compared with available results of quasi-classical calculations. The coefficients calculated are required in the modelling of many industrial processes such as plasma etching, surface treatment, plasma sterilization, and medicine.