Micro-convex structure-assisted laser-induced backside dry etching for high-efficiency fabrication of micro-groove array on fused silica toward manipulation of wetting characteristics

Fused silica has garnered significant attention in various industrial applications. The creation of surface micro/nanostructures on fused silica can impart specialized functional properties, such as extreme wettability, ultra-high transmittance, and excellent antimicrobial characteristics. Nonetheless, existing technologies for achieving surface micro/nanopatterning of fused silica, including wire electrical discharge machining, chemical etching, and electrochemical deposition, generally suffer from long processing cycles and high energy consumption, which are inconsistent with the development concept of the low-carbon economy. In this study, a novel approach termed micro-convex structure-assisted laser-induced backside dry etching (MCSALIBDE) is proposed for high-efficiency fabrication of micro-groove array on fused silica surfaces. The synergistic effect of enhanced heat conduction and plasma explosion in a confined space facilitates material ablation. The impact of processing parameters including scanning pitch and peak laser power intensity on the morphological and topographical features of the MCSALIBDE-processed fused silica surfaces is studied. Notably, the micro-groove structures with a depth-to-width ratio of 1.19 is fabricated. Furthermore, the wetting behaviors of the MCSALIBDE-processed fused silica surfaces before and after annealing treatment are studied. Experimental findings reveal that the MCSALIBDE-processed fused silica surfaces exhibit enhanced hydrophilicity compared to the untreated one. After annealing treatment, a transformation from hydrophilicity to superhydrophobicity is observed. The superhydrophobic surfaces produced under different laser parameters exhibit distinct adhesion and droplet bouncing behaviors. This work offers an in-depth understanding of the high-efficiency fabrication of micro/nanostructures on fused silica surfaces and as well the modulation of their wetting characteristics, heralding innovations in surface engineering for diverse applications.