Influence of Electrolyte Pressure on Localised Electrochemical Deposition Quality

Micro-nanostructures have unique advantages and are widely used in fields such as microelectronics, biomedicine, optical engineering, and renewable energy. However, these fields have extremely strict requirements for the accuracy and performance of micro-nanostructures, and the manufacture of high-quality and high-precision microstructures has become an urgent research problem. This study focuses on the influence of the electrolyte extrusion pressure on the flow rate, current density, and deposition quality. The results indicate that the deposition structure presents a characteristic columnar growth morphology. Within a certain range, a higher extrusion pressure can enhance the quality and precision of the deposition structures. As the extrusion pressure increases, the uniformity of the deposition structure is significantly improved, with a roughness of up to 19.343 nm and a uniformity coefficient α <0.2. In addition, this study establishes a relationship model between the extrusion pressure and deposition diameter, accurately adjusting the deposition diameter within a specific range and overcoming the difficulties of high-precision micro-nanostructure manufacturing. This model provides guidance for electrochemical deposition manufacturing and a solid foundation for further application and development of micro-nanostructures.