用于前红外热成像的ZnSe透镜的单步精密制造:从原子洞察到实验室规模的制造和集成

IF 6.1 1区 工程技术 Q1 ENGINEERING, MANUFACTURING
Neha Khatri , Sonam Berwal , Bharpoor Singh , Suman Tewary , K. Manjunath , Saurav Goel
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引用次数: 0

摘要

硒化锌(ZnSe)具有中等的折射率和宽的红外透射范围(0.6 ~ 21 μm),广泛应用于光学元件,包括透镜、反射镜和热成像系统。然而,其软脆的性质为实现精密制造所需的纳米级光滑表面提出了挑战。本研究介绍了ZnSe的单步精密制造工艺,并演示了其在集成电路中用于热检测的FLIR热成像系统中的平面凸透镜中的应用。为了探究ZnSe的延性塑性,我们建立了分子动力学(MD)模型。广义层错能(GSFE)计算显示,ZnSe有利于在Shuffle集合⟨110⟩(111)上滑动,不像硅和碳化硅等较硬,脆性的材料,它们有利于Glide集合⟨11-2⟩(111),解释了ZnSe的柔软和脆性。该模型预测,约0.027 GPa的Peierls应力启动沿(111)滑移面的½⟨110⟩完全位错的运动,导致塑性和位错解离成1/6⟨112⟩(Shockley)部分位错。切削区形貌分析发现,锌闪锌矿相变为六边形结构,存在本征层错和∑3共格孪晶界等缺陷。此外,模拟表明(100)取向对塑性变形的应力要求最小,而(110)取向对塑性变形的应力要求最大。通过揭示这些机制,本研究旨在增强我们对ZnSe精密加工的理解,指导优化切削策略的开发,以最大限度地减少缺陷并提高制造效果。总之,它引入了一种“从设计到制造”的方法,将原子水平的见解与ZnSe透镜在热成像应用中的实际集成联系起来。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Single-step precision manufacturing of ZnSe lenses for FLIR thermal imaging: From atomic insights to lab-scale fabrication and integration

Single-step precision manufacturing of ZnSe lenses for FLIR thermal imaging: From atomic insights to lab-scale fabrication and integration
Zinc selenide (ZnSe) is widely used in optical components, including lenses, mirrors and thermal imaging systems, owing to its medium refractive index and broad infrared transmission range (0.6 to 21 μm). However, its soft-brittle nature presents challenges in achieving the nanometric smooth finishes required for precision manufacturing. This study introduces a single-step precision manufacturing process for ZnSe and demonstrates its application in a plano-convex lens integrated into FLIR thermal imaging systems for heat detection in integrated circuits.
To explore ZnSe's ductile plasticity, we developed a molecular dynamics (MD) model. Generalized Stacking Fault Energy (GSFE) calculations revealed that ZnSe favours slip on the Shuffle set ⟨110⟩ (111), unlike harder, brittle materials like silicon and silicon carbide, which favour the Glide set ⟨11–2⟩ (111) explaining the soft and brittle nature of ZnSe. The model predicted that a Peierls stress of approximately 0.027 GPa initiates the motion of ½ ⟨110⟩ perfect dislocations along the (111) slip planes, leading to plasticity and dislocation dissociation into 1/6 ⟨112⟩ (Shockley) partial dislocations. Analysis of the cutting region revealed phase transformation from zinc-blende to a hexagonal structure and defects, including intrinsic stacking faults and ∑3 coherent twin boundaries. Additionally, simulations indicated that the (100) orientation requires the least stress for plastic deformation, while the (110) orientation requires the most.
By shedding light on these mechanisms, this research aims to enhance our understanding of the precision machining of ZnSe, guiding the development of optimised cutting strategies to minimise defects and improve manufacturing outcomes. In sum, it introduces a “Design-to-Manufacture” approach, linking atomic-level insights with the practical integration of ZnSe lenses into thermal imaging applications.
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来源期刊
Journal of Manufacturing Processes
Journal of Manufacturing Processes ENGINEERING, MANUFACTURING-
CiteScore
10.20
自引率
11.30%
发文量
833
审稿时长
50 days
期刊介绍: The aim of the Journal of Manufacturing Processes (JMP) is to exchange current and future directions of manufacturing processes research, development and implementation, and to publish archival scholarly literature with a view to advancing state-of-the-art manufacturing processes and encouraging innovation for developing new and efficient processes. The journal will also publish from other research communities for rapid communication of innovative new concepts. Special-topic issues on emerging technologies and invited papers will also be published.
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