激光等离子体辐射源在软x射线范围内的反射测量

IF 0.6 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Bulletin of the Lebedev Physics Institute Pub Date : 2025-03-18 DOI:10.3103/S1068335625600019

E. N. Ragozin

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引用次数: 0

摘要

讨论了波长小于300 Å的掠入射光栅反射计的设计与应用。重点是使用激光产生的等离子体源的反射计，该反射计由具有“中等”输出参数的脉冲周期激光器激发（脉冲能量为0.1至1j，脉冲持续时间为10ns或更短）。我们的发现可以用于软x射线光谱范围内的计量设施的开发，无论是基于实验室的还是通过投影x射线光刻技术集成电路的商业生产。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Reflectometry in the Soft X-Ray Range with a Laser-Plasma Radiation Source

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Reflectometry in the Soft X-Ray Range with a Laser-Plasma Radiation Source

The design and application of reflectometers with a grazing incidence grating for the wavelength region shorter than 300 Å are discussed. The focus is on reflectometers with laser-produced plasma sources excited by a pulsed-periodic laser with “moderate” output parameters (pulse energy of 0.1 to 1 J, pulse duration of 10 ns or less). Our findings can be useful for the development of metrological facilities in the soft X-ray range of the spectrum, both laboratory-based and included in commercial production of integrated circuits by projection X-ray lithography.

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来源期刊

Bulletin of the Lebedev Physics Institute PHYSICS, MULTIDISCIPLINARY-

CiteScore

0.70

自引率

25.00%

发文量

审稿时长

6-12 weeks

期刊介绍： Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.