真空（无气）磁控溅射系统中放电和等离子体参数的测量

IF 0.48 Q4 Physics and Astronomy

Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2025-03-18 DOI:10.1134/S1062873824710638

M. V. Shandrikov, M. I. Azhgikhin, A. S. Bugaev, A. A. Cherkasov, P. V. Moskvin, E. M. Oks, K. P. Savkin, K. A. Shcheglov, G. Yu. Yushkov

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引用次数: 0

摘要

本文介绍了在真空（无气体）模式下，平面靶连续磁控管放电的实验研究结果。放电过程中真空室的基压为3 × 10 - 5托，磁控管电流为10 a。我们开发了在强靶溅射条件下测量等离子体离子的质荷比和电子温度的技术。对目标温度进行了测量。我们开发了在气体和真空模式下比较基板附近目标材料的离子流密度和电离程度的技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Measurement of Discharge and Plasma Parameters in a Vacuum (Gasless) Magnetron Sputtering System

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Measurement of Discharge and Plasma Parameters in a Vacuum (Gasless) Magnetron Sputtering System

We presented results of an experimental study of a continuous magnetron discharge in vacuum (gasless) mode with a flat target. The base pressure in the vacuum chamber during the discharge operation was 3 × 10^–5 Torr at a magnetron current of 10 A. We developed techniques for measuring the mass-to-charge composition of plasma ions and the electron temperature under conditions of intense target sputtering. Measurement of target temperature was carried out. We developed techniques for comparison of ion current density and degree of ionization of the target material near the substrate in gas and vacuum modes.

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来源期刊

Bulletin of the Russian Academy of Sciences: Physics Physics and Astronomy-Physics and Astronomy (all)

CiteScore

0.90

自引率

0.00%

发文量

251

期刊介绍： Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.