元素组成对磁控溅射沉积的 Ti-B-C 涂层电阻率的影响

IF 0.3 4区物理与天体物理 Q4 PHYSICS, NUCLEAR

Physics of Atomic Nuclei Pub Date : 2025-02-22 DOI:10.1134/S1063778824090163

Ph. V. Kiryukhantsev-Korneev, A. D. Chertova, V. V. Kuts, Yu. S. Pogozhev

{"title":"元素组成对磁控溅射沉积的 Ti-B-C 涂层电阻率的影响","authors":"Ph. V. Kiryukhantsev-Korneev, A. D. Chertova, V. V. Kuts, Yu. S. Pogozhev","doi":"10.1134/S1063778824090163","DOIUrl":null,"url":null,"abstract":"Ti–B–C coatings of various compositions were obtained by magnetron sputtering using a TiB2–TiC heterophase target and were deposited on a Si(111) substrate. The studies were carried out using glow discharge optical emission spectroscopy, X-ray diffraction, and scanning electron microscopy. The electrical resistivity was measured using the four-probe method. The coatings had a dense, low-defect structure based on the hexagonal TiB2 phase and were characterized by a uniform distribution of elements throughout the thickness. It has been established that the electrical resistivity decreases from 314 to 249 µΩ cm with an increase in the titanium content in coatings from 27 to 42 at %.","PeriodicalId":728,"journal":{"name":"Physics of Atomic Nuclei","volume":"87 11","pages":"1591 - 1595"},"PeriodicalIF":0.3000,"publicationDate":"2025-02-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of the Elemental Composition on the Electrical Resistivity of Ti–B–C Coatings Deposited by Magnetron Sputtering\",\"authors\":\"Ph. V. Kiryukhantsev-Korneev, A. D. Chertova, V. V. Kuts, Yu. S. Pogozhev\",\"doi\":\"10.1134/S1063778824090163\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ti–B–C coatings of various compositions were obtained by magnetron sputtering using a TiB2–TiC heterophase target and were deposited on a Si(111) substrate. The studies were carried out using glow discharge optical emission spectroscopy, X-ray diffraction, and scanning electron microscopy. The electrical resistivity was measured using the four-probe method. The coatings had a dense, low-defect structure based on the hexagonal TiB2 phase and were characterized by a uniform distribution of elements throughout the thickness. It has been established that the electrical resistivity decreases from 314 to 249 µΩ cm with an increase in the titanium content in coatings from 27 to 42 at %.\",\"PeriodicalId\":728,\"journal\":{\"name\":\"Physics of Atomic Nuclei\",\"volume\":\"87 11\",\"pages\":\"1591 - 1595\"},\"PeriodicalIF\":0.3000,\"publicationDate\":\"2025-02-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physics of Atomic Nuclei\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063778824090163\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, NUCLEAR\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of Atomic Nuclei","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063778824090163","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, NUCLEAR","Score":null,"Total":0}

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摘要

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Influence of the Elemental Composition on the Electrical Resistivity of Ti–B–C Coatings Deposited by Magnetron Sputtering

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Influence of the Elemental Composition on the Electrical Resistivity of Ti–B–C Coatings Deposited by Magnetron Sputtering

Ti–B–C coatings of various compositions were obtained by magnetron sputtering using a TiB₂–TiC heterophase target and were deposited on a Si(111) substrate. The studies were carried out using glow discharge optical emission spectroscopy, X-ray diffraction, and scanning electron microscopy. The electrical resistivity was measured using the four-probe method. The coatings had a dense, low-defect structure based on the hexagonal TiB₂ phase and were characterized by a uniform distribution of elements throughout the thickness. It has been established that the electrical resistivity decreases from 314 to 249 µΩ cm with an increase in the titanium content in coatings from 27 to 42 at %.

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来源期刊

Physics of Atomic Nuclei 物理-物理：核物理

CiteScore

0.60

自引率

25.00%

发文量

审稿时长

3-6 weeks

期刊介绍： Physics of Atomic Nuclei is a journal that covers experimental and theoretical studies of nuclear physics: nuclear structure, spectra, and properties; radiation, fission, and nuclear reactions induced by photons, leptons, hadrons, and nuclei; fundamental interactions and symmetries; hadrons (with light, strange, charm, and bottom quarks); particle collisions at high and superhigh energies; gauge and unified quantum field theories, quark models, supersymmetry and supergravity, astrophysics and cosmology.